Introduction
Manual SS Y Inline Valves (CF Flanged; Viton Bonnet) are robust isolation valves designed for high-vacuum (HV) and ultra-high-vacuum (UHV-compatible) systems where reliability, cleanliness, and precise flow control are essential. Commonly installed in straight-through vacuum lines, these valves provide dependable on/off isolation for research instruments, semiconductor tools, and industrial vacuum processes.
Detailed Description
These manual inline valves feature a stainless steel Y-pattern body, optimizing conductance while minimizing turbulence and pressure drop. The CF (ConFlat) flanged ends use metal gasket sealing for excellent vacuum integrity, making them suitable for demanding environments that require low leak rates and thermal stability.
A Viton® bonnet seal ensures smooth manual operation and reliable sealing across repeated cycles. This configuration balances performance and serviceability—ideal for systems that do not require frequent bakeouts beyond Viton’s temperature range. Precision machining, clean internal surfaces, and tight tolerances reduce particle generation and outgassing, helping maintain stable base pressures.
Key characteristics include:
Straight-through Y-pattern for improved flow
All-metal body construction (vacuum-grade stainless steel)
Hand-operated mechanism for precise, repeatable isolation
CF knife-edge sealing compatible with standard copper gaskets
Applications
High-vacuum pumping lines and manifolds
Thin film deposition systems (PVD, sputtering, evaporation)
Semiconductor process equipment and load-locks
Analytical instruments and R&D vacuum setups
Vacuum furnaces and test chambers
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Body Material | Stainless Steel 304 / 316L | Corrosion resistance, low outgassing |
| Valve Type | Manual inline (Y-pattern) | Efficient flow, minimal pressure loss |
| Flange Standard | CF (DN16 – DN160, custom) | UHV-compatible metal sealing |
| Bonnet Seal | Viton® | Smooth operation, reliable sealing |
| Leak Rate | ≤ 1×10⁻⁹ mbar·L/s (typical) | Ensures vacuum integrity |
| Bakeout Temperature | Up to ~150 °C (Viton-limited) | Defines thermal operating window |
Comparison with Related Valve Types
| Valve Type | Key Advantage | Typical Application |
|---|---|---|
| Manual SS Y Inline Valve (CF; Viton) | Reliable isolation, good conductance | General HV/UHV-compatible systems |
| Bellows-Sealed CF Valve | Zero stem leakage, higher bakeout | UHV & baked systems |
| KF Manual Valve | Fast assembly, lower cost | HV, frequent reconfiguration |
FAQ
| Question | Answer |
|---|---|
| Is this valve suitable for UHV systems? | Yes, CF flanges are UHV-compatible; Viton limits bakeout temperature. |
| Can the valve be baked? | Yes, typically up to ~150 °C due to the Viton bonnet. |
| Are other seal options available? | Bellows-sealed or all-metal versions are available on request. |
| Can sizes be customized? | Yes, flange sizes and face-to-face lengths can be tailored. |
| How is cleanliness ensured? | Valves are cleaned and packed for vacuum service before shipment. |
Packaging
Our Manual SS Y Inline Valves (CF Flanged; Viton Bonnet) are thoroughly cleaned, capped, and individually packed. Protective foam and export-grade cartons or wooden crates are used to prevent damage and contamination during transportation and storage.
Conclusion
Manual SS Y Inline Valves (CF Flanged; Viton Bonnet) offer a dependable, cost-effective solution for isolating vacuum lines while maintaining excellent conductance and sealing performance. Their stainless steel construction, CF compatibility, and smooth manual control make them a trusted choice for both research and industrial vacuum systems.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.




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