Reliable and Economical Components for HV and UHV Applications
These valves are designed for high-vacuum (HV) and ultra-high-vacuum (UHV) environments where cleanliness and corrosion resistance are essential. Offering a cost-effective and reliable solution, they are ideal for general-purpose use.
High Conductance in Open Position
When the valve is open, the edge-welded bellows and valve seat are retracted from the gas path, ensuring optimal gas flow and achieving high conductance.
Key Features:
- Leak Rate: Low leak rate across the seat at 2×10⁻⁹ mbar L/s, making it suitable for vacuum-sensitive applications.
- Pressure Range:
- Maximum pressure: Atmospheric pressure
- Minimum pressure: 1×10⁻⁹ Torr
- Sealing Options: Includes fluorocarbon o-ring seat seals, bellows-sealed shafts, and bonnet seals. For higher temperature bakeout and enhanced vacuum performance, copper seals can be selected.
- Actuation Options: Available in both manual and pneumatic actuation to accommodate different system needs.
- Easy Maintenance: Standard repairs can be performed without removing the valve body, reducing downtime and making maintenance hassle-free.
Specifications Table
| Manufacturer | TFM |
|---|---|
| Pressure | Torr Min: 1.000 x 10-9 Torr Max: 760 Torrmbar 1.330 x 10-9 mbar atm 1.00 atm |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºFOpen Bake 100 ºC 212 ºF |
| Actuator Type | Manual |
| Bonnet Seal Type | Viton |
| Valve Body Material | 304L SS |
| Valve Seal Material | Viton |
| Shaft Seal | Bellows |




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