Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.040–0.070 Section): Micro-Scale Sealing for High-Purity Plasma and Chemical Applications
Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.040–0.070 section) from TFM are engineered for ultra-compact sealing in high-temperature and high-purity environments such as semiconductor processing, plasma chambers, and chemical analysis systems. Fabricated using Kalrez® 4079, these O-rings deliver unmatched resistance to aggressive chemicals, reactive gases, and harsh vacuum conditions while operating at continuous temperatures up to 316°C.
The 0.040–0.070 inch cross-sectional range is ideal for ultra-fine sealing points where space is extremely limited but failure is not an option. These O-rings maintain their form and sealing properties through thermal cycling, ensuring stable performance in CVD, etching, and gas delivery systems.
Product Specifications:
Material: Kalrez® 4079 (Perfluoroelastomer, FFKM)
Color: Black
Durometer: 75 Shore A
Cross-Section Range: 0.040″ to 0.070″
Temperature Range: –19°C to +316°C (continuous), short-term excursions above this limit
Key Benefits:
Exceptional chemical resistance to acids, bases, solvents, and plasma environments
Minimal outgassing and weight loss, ideal for UHV and cleanroom systems
Low compression set, even after prolonged high-temperature exposure
Precision sealing for micro instrumentation and gas lines
Compatible with dry and wet semiconductor processing environments
Limitations:
Not recommended for use with hot water or steam
Avoid contact with hot aliphatic amines, ethylene oxide, and propylene oxide
Typical Applications:
Micro-sealing in plasma etchers, ALD/CVD tools, and semiconductor subassemblies
High-purity gas distribution modules and pressure regulators
Miniature UHV systems, analytical instruments, and chemical containment
Valve seats and O-ring glands in confined high-temperature areas
TFM’s Kalrez® FFKM O-Rings (0.040–0.070 section) offer the highest performance available for micro-sealing tasks where chemical purity, thermal endurance, and dimensional precision are critical to system integrity.
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