Perfluoroelastomer (FFKM) Kalrez® O-rings (0.139 Section)

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.139 Section): High-Purity Micro Seals for Semiconductor and Plasma Processing

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.139 section) from TFM deliver unmatched performance in ultra-clean and high-temperature environments, making them ideal for semiconductor manufacturing, reactive plasma systems, and precision chemical processing. These O-rings are manufactured using Kalrez® 4079, a trusted FFKM compound known for its low compression set, low weight loss, and broad chemical resistance.

With a compact 0.139-inch cross-section, this O-ring size is particularly suited for instrumentation ports, gas lines, and miniature sealing points within etch, deposition, or diffusion tools. Kalrez® 4079 withstands continuous operation up to 316°C, enabling it to perform consistently through thermal cycling and plasma exposure.

Product Specifications:

• Material Grade: Kalrez® 4079 (FFKM)

• Color: Black

• Durometer Hardness: 75 Shore A

• Cross-Section Diameter: 0.139 inches

• Temperature Range: –19°C to +316°C (continuous)

Key Benefits:

• Exceptional chemical resistance to acids, solvents, and aggressive plasma byproducts

• Low weight loss in reactive plasma environments, minimizing contamination

• Excellent sealing memory even under extreme thermal cycling

• UHV-compatible, with very low outgassing and particle generation

• Designed for semiconductor wet and dry process compatibility

Not Suitable For:

• Hot water or steam exposure

• Aliphatic amines at high temperatures

• Ethylene oxide or propylene oxide

Ideal Applications:

• Seals in semiconductor tools (etchers, CVD, ALD)

• Miniature gas line seals and instrument connections

• Analytical instrumentation exposed to aggressive chemistries

• High-purity environments requiring chemical and thermal endurance

TFM’s Kalrez® FFKM O-Rings (0.139 section) are the go-to solution when precision, cleanliness, and extreme chemical durability are mandatory in high-tech and high-temperature sealing applications.

Ordering Table

Drawing	Reference	O-Ring Size	O-Ring Material	O-Ring OD	O-Ring ID	O-Ring Cross Section	O-Ring Color	Part Number
	O-ring Seals, Kalrez	201	4079 Kalrez	0.449	0.171	0.139	Black	O-K201
	O-ring Seals, Kalrez	202	4079 Kalrez	0.512	0.234	0.139	Black	O-K202
	O-ring Seals, Kalrez	203	4079 Kalrez	0.574	0.296	0.139	Black	O-K203
	O-ring Seals, Kalrez	204	4079 Kalrez	0.637	0.359	0.139	Black	O-K204
	O-ring Seals, Kalrez	205	4079 Kalrez	0.699	0.421	0.139	Black	O-K205
	O-ring Seals, Kalrez	206	4079 Kalrez	0.762	0.484	0.139	Black	O-K206
	O-ring Seals, Kalrez	207	4079 Kalrez	0.824	0.546	0.139	Black	O-K207
	O-ring Seals, Kalrez	208	4079 Kalrez	0.887	0.609	0.139	Black	O-K208
	O-ring Seals, Kalrez	209	4079 Kalrez	0.949	0.671	0.139	Black	O-K209
	O-ring Seals, Kalrez	210	4079 Kalrez	1.012	0.734	0.139	Black	O-K210
	O-ring Seals, Kalrez	211	4079 Kalrez	1.074	0.796	0.139	Black	O-K211
	O-ring Seals, Kalrez	212	4079 Kalrez	1.137	0.859	0.139	Black	O-K212
	O-ring Seals, Kalrez	213	4079 Kalrez	1.199	0.921	0.139	Black	O-K213
	O-ring Seals, Kalrez	214	4079 Kalrez	1.262	0.984	0.139	Black	O-K214
	O-ring Seals, Kalrez	215	4079 Kalrez	1.324	1.046	0.139	Black	O-K215
	O-ring Seals, Kalrez	216	4079 Kalrez	1.387	1.109	0.139	Black	O-K216
	O-ring Seals, Kalrez	217	4079 Kalrez	1.449	1.171	0.139	Black	O-K217
	O-ring Seals, Kalrez	218	4079 Kalrez	1.512	1.234	0.139	Black	O-K218
	O-ring Seals, Kalrez	219	4079 Kalrez	1.574	1.296	0.139	Black	O-K219
	O-ring Seals, Kalrez	220	4079 Kalrez	1.637	1.359	0.139	Black	O-K220
	O-ring Seals, Kalrez	221	4079 Kalrez	1.699	1.421	0.139	Black	O-K221
	O-ring Seals, Kalrez	222	4079 Kalrez	1.762	1.484	0.139	Black	O-K222
	O-ring Seals, Kalrez	223	4079 Kalrez	1.887	1.609	0.139	Black	O-K223
	O-ring Seals, Kalrez	224	4079 Kalrez	2.012	1.734	0.139	Black	O-K224
	O-ring Seals, Kalrez	225	4079 Kalrez	2.137	1.859	0.139	Black	O-K225
	O-ring Seals, Kalrez	226	4079 Kalrez	2.262	1.984	0.139	Black	O-K226
	O-ring Seals, Kalrez	227	4079 Kalrez	2.387	2.109	0.139	Black	O-K227
	O-ring Seals, Kalrez	228	4079 Kalrez	2.512	2.234	0.139	Black	O-K228
	O-ring Seals, Kalrez	229	4079 Kalrez	2.637	2.359	0.139	Black	O-K229
	O-ring Seals, Kalrez	230	4079 Kalrez	2.762	2.484	0.139	Black	O-K230
	O-ring Seals, Kalrez	231	4079 Kalrez	2.887	2.609	0.139	Black	O-K231
	O-ring Seals, Kalrez	232	4079 Kalrez	3.012	2.734	0.139	Black	O-K232
	O-ring Seals, Kalrez	233	4079 Kalrez	3.137	2.859	0.139	Black	O-K233
	O-ring Seals, Kalrez	234	4079 Kalrez	3.262	2.984	0.139	Black	O-K234
	O-ring Seals, Kalrez	235	4079 Kalrez	3.387	3.109	0.139	Black	O-K235
	O-ring Seals, Kalrez	236	4079 Kalrez	3.512	3.234	0.139	Black	O-K236
	O-ring Seals, Kalrez	237	4079 Kalrez	3.637	3.359	0.139	Black	O-K237
	O-ring Seals, Kalrez	238	4079 Kalrez	3.762	3.484	0.139	Black	O-K238
	O-ring Seals, Kalrez	239	4079 Kalrez	3.887	3.609	0.139	Black	O-K239
	O-ring Seals, Kalrez	240	4079 Kalrez	4.012	3.734	0.139	Black	O-K240
	O-ring Seals, Kalrez	241	4079 Kalrez	4.137	3.859	0.139	Black	O-K241
	O-ring Seals, Kalrez	242	4079 Kalrez	4.262	3.984	0.139	Black	O-K242
	O-ring Seals, Kalrez	243	4079 Kalrez	4.387	4.109	0.139	Black	O-K243
	O-ring Seals, Kalrez	244	4079 Kalrez	4.512	4.234	0.139	Black	O-K244
	O-ring Seals, Kalrez	245	4079 Kalrez	4.637	4.359	0.139	Black	O-K245
	O-ring Seals, Kalrez	246	4079 Kalrez	4.762	4.484	0.139	Black	O-K246
	O-ring Seals, Kalrez	247	4079 Kalrez	4.887	4.609	0.139	Black	O-K247
	O-ring Seals, Kalrez	248	4079 Kalrez	5.012	4.734	0.139	Black	O-K248
	O-ring Seals, Kalrez	249	4079 Kalrez	5.137	4.859	0.139	Black	O-K249
	O-ring Seals, Kalrez	250	4079 Kalrez	5.262	4.984	0.139	Black	O-K250
	O-ring Seals, Kalrez	251	4079 Kalrez	5.387	5.109	0.139	Black	O-K251
	O-ring Seals, Kalrez	252	4079 Kalrez	5.512	5.234	0.139	Black	O-K252
	O-ring Seals, Kalrez	253	4079 Kalrez	5.637	5.359	0.139	Black	O-K253
	O-ring Seals, Kalrez	254	4079 Kalrez	5.762	5.484	0.139	Black	O-K254
	O-ring Seals, Kalrez	255	4079 Kalrez	5.887	5.609	0.139	Black	O-K255
	O-ring Seals, Kalrez	256	4079 Kalrez	6.012	5.734	0.139	Black	O-K256
	O-ring Seals, Kalrez	257	4079 Kalrez	6.137	5.859	0.139	Black	O-K257
	O-ring Seals, Kalrez	258	4079 Kalrez	6.262	5.984	0.139	Black	O-K258
	O-ring Seals, Kalrez	259	4079 Kalrez	6.512	6.234	0.139	Black	O-K259
	O-ring Seals, Kalrez	260	4079 Kalrez	6.762	6.484	0.139	Black	O-K260
	O-ring Seals, Kalrez	261	4079 Kalrez	7.012	6.734	0.139	Black	O-K261
	O-ring Seals, Kalrez	262	4079 Kalrez	7.262	6.984	0.139	Black	O-K262
	O-ring Seals, Kalrez	263	4079 Kalrez	7.512	7.234	0.139	Black	O-K263
	O-ring Seals, Kalrez	264	4079 Kalrez	7.762	7.484	0.139	Black	O-K264
	O-ring Seals, Kalrez	265	4079 Kalrez	8.012	7.734	0.139	Black	O-K265
	O-ring Seals, Kalrez	266	4079 Kalrez	8.262	7.984	0.139	Black	O-K266
	O-ring Seals, Kalrez	267	4079 Kalrez	8.512	8.234	0.139	Black	O-K267
	O-ring Seals, Kalrez	268	4079 Kalrez	8.762	8.484	0.139	Black	O-K268
	O-ring Seals, Kalrez	269	4079 Kalrez	9.012	8.734	0.139	Black	O-K269
	O-ring Seals, Kalrez	270	4079 Kalrez	9.262	8.984	0.139	Black	O-K270
	O-ring Seals, Kalrez	271	4079 Kalrez	9.512	9.234	0.139	Black	O-K271
	O-ring Seals, Kalrez	272	4079 Kalrez	9.762	9.484	0.139	Black	O-K272
	O-ring Seals, Kalrez	273	4079 Kalrez	10.012	9.734	0.139	Black	O-K273
	O-ring Seals, Kalrez	274	4079 Kalrez	10.262	9.984	0.139	Black	O-K274
	O-ring Seals, Kalrez	275	4079 Kalrez	10.762	10.484	0.139	Black	O-K275
	O-ring Seals, Kalrez	276	4079 Kalrez	11.262	10.984	0.139	Black	O-K276
	O-ring Seals, Kalrez	277	4079 Kalrez	11.762	11.484	0.139	Black	O-K277
	O-ring Seals, Kalrez	278	4079 Kalrez	12.262	11.984	0.139	Black	O-K278
	O-ring Seals, Kalrez	279	4079 Kalrez	13.262	12.984	0.139	Black	O-K279
	O-ring Seals, Kalrez	280	4079 Kalrez	14.262	13.984	0.139	Black	O-K280
	O-ring Seals, Kalrez	281	4079 Kalrez	15.262	14.984	0.139	Black	O-K281
	O-ring Seals, Kalrez	282	4079 Kalrez	16.233	15.955	0.139	Black	O-K282
	O-ring Seals, Kalrez	283	4079 Kalrez	17.233	16.955	0.139	Black	O-K283
	O-ring Seals, Kalrez	284	4079 Kalrez	18.233	17.955	0.139	Black	O-K284