What factors should I consider when choosing the right sputtering target?

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Do you offer custom sputtering targets or evaporation materials?

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Can you provide advice on the optimal material for a specific thin film application?

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Can you supply small quantities of materials for research and development purposes?

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.

Perfluoroelastomer (FFKM) Kalrez® O-rings (0.210 Section)

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.210 Section): Precision Sealing for Harsh Semiconductor and Plasma Environments

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.210 section) from TFM are specifically designed for demanding semiconductor, plasma, and chemical processing systems. Manufactured using Kalrez® 4079, a high-performance FFKM compound, these O-rings provide superior chemical resistance, mechanical durability, and thermal stability in environments that involve reactive plasma, aggressive chemicals, and high heat.

With a 0.210-inch cross-section, this size is ideal for medium-scale sealing applications in CVD/PVD equipment, gas delivery systems, and etch chambers where reliability and purity are essential. Kalrez® 4079 performs reliably in continuous service at up to 316°C, and is capable of withstanding higher temperatures briefly.

Product Specifications:

Material Grade: Kalrez® 4079 (Perfluoroelastomer, FFKM)
Color: Black
Durometer: 75 Shore A
Cross-Section Diameter: 0.210 inches
Temperature Range: –19°C to +316°C (continuous), short-term excursions allowed

Key Features:

Exceptional Chemical Resistance to acids, solvents, and reactive gases
Low Weight Loss in Plasma, reducing contamination in clean environments
Excellent Compression Set Resistance for reliable long-term sealing
Thermal Endurance for high-heat, high-vacuum, and cycling environments
UHV & Semiconductor Grade Performance

Not Recommended For:

Hot water or steam exposure
Hot aliphatic amines
Ethylene oxide or propylene oxide

Common Applications:

Semiconductor process tools (etch, deposition, diffusion)
Gas delivery manifolds and high-purity valves
Analytical instrumentation under corrosive or high-temperature conditions
Vacuum system interfaces in plasma-enhanced processes

TFM’s Kalrez® FFKM O-Rings (0.210 section) ensure uncompromising performance where ultra-high purity, temperature resilience, and chemical compatibility are critical to uptime and yield.

Ordering Table

Drawing	Reference	O-Ring Size	O-Ring Material	O-Ring OD	O-Ring ID	O-Ring Cross Section	O-Ring Color	Part Number
	O-ring Seals, Kalrez	309	4079 Kalrez	0.832	0.412	0.210	Black	O-K309
	O-ring Seals, Kalrez	310	4079 Kalrez	0.895	0.475	0.210	Black	O-K310
	O-ring Seals, Kalrez	311	4079 Kalrez	0.957	0.537	0.210	Black	O-K311
	O-ring Seals, Kalrez	312	4079 Kalrez	1.020	0.600	0.210	Black	O-K312
	O-ring Seals, Kalrez	313	4079 Kalrez	1.082	0.662	0.210	Black	O-K313
	O-ring Seals, Kalrez	314	4079 Kalrez	1.145	0.725	0.210	Black	O-K314
	O-ring Seals, Kalrez	315	4079 Kalrez	1.207	0.787	0.210	Black	O-K315
	O-ring Seals, Kalrez	316	4079 Kalrez	1.270	0.850	0.210	Black	O-K316
	O-ring Seals, Kalrez	317	4079 Kalrez	1.332	0.912	0.210	Black	O-K317
	O-ring Seals, Kalrez	318	4079 Kalrez	1.395	0.975	0.210	Black	O-K318
	O-ring Seals, Kalrez	319	4079 Kalrez	1.457	1.037	0.210	Black	O-K319
	O-ring Seals, Kalrez	320	4079 Kalrez	1.520	1.100	0.210	Black	O-K320
	O-ring Seals, Kalrez	321	4079 Kalrez	1.582	1.162	0.210	Black	O-K321
	O-ring Seals, Kalrez	322	4079 Kalrez	1.645	1.225	0.210	Black	O-K322
	O-ring Seals, Kalrez	323	4079 Kalrez	1.707	1.287	0.210	Black	O-K323
	O-ring Seals, Kalrez	324	4079 Kalrez	1.770	1.350	0.210	Black	O-K324
	O-ring Seals, Kalrez	325	4079 Kalrez	1.895	1.475	0.210	Black	O-K325
	O-ring Seals, Kalrez	326	4079 Kalrez	2.020	1.600	0.210	Black	O-K326
	O-ring Seals, Kalrez	327	4079 Kalrez	2.145	1.725	0.210	Black	O-K327
	O-ring Seals, Kalrez	328	4079 Kalrez	2.270	1.850	0.210	Black	O-K328
	O-ring Seals, Kalrez	329	4079 Kalrez	2.395	1.975	0.210	Black	O-K329
	O-ring Seals, Kalrez	330	4079 Kalrez	2.520	2.100	0.210	Black	O-K330
	O-ring Seals, Kalrez	331	4079 Kalrez	2.645	2.225	0.210	Black	O-K331
	O-ring Seals, Kalrez	332	4079 Kalrez	2.770	2.350	0.210	Black	O-K332
	O-ring Seals, Kalrez	333	4079 Kalrez	2.895	2.475	0.210	Black	O-K333
	O-ring Seals, Kalrez	334	4079 Kalrez	3.020	2.600	0.210	Black	O-K334
	O-ring Seals, Kalrez	335	4079 Kalrez	3.145	2.725	0.210	Black	O-K335
	O-ring Seals, Kalrez	336	4079 Kalrez	3.270	2.850	0.210	Black	O-K336
	O-ring Seals, Kalrez	337	4079 Kalrez	3.395	2.975	0.210	Black	O-K337
	O-ring Seals, Kalrez	338	4079 Kalrez	3.520	3.100	0.210	Black	O-K338
	O-ring Seals, Kalrez	339	4079 Kalrez	3.645	3.225	0.210	Black	O-K339
	O-ring Seals, Kalrez	340	4079 Kalrez	3.770	3.350	0.210	Black	O-K340
	O-ring Seals, Kalrez	341	4079 Kalrez	3.895	3.475	0.210	Black	O-K341
	O-ring Seals, Kalrez	342	4079 Kalrez	4.020	3.600	0.210	Black	O-K342
	O-ring Seals, Kalrez	343	4079 Kalrez	4.145	3.725	0.210	Black	O-K343
	O-ring Seals, Kalrez	344	4079 Kalrez	4.270	3.850	0.210	Black	O-K344
	O-ring Seals, Kalrez	345	4079 Kalrez	4.395	3.975	0.210	Black	O-K345
	O-ring Seals, Kalrez	346	4079 Kalrez	4.520	4.100	0.210	Black	O-K346
	O-ring Seals, Kalrez	347	4079 Kalrez	4.645	4.225	0.210	Black	O-K347
	O-ring Seals, Kalrez	348	4079 Kalrez	4.770	4.350	0.210	Black	O-K348
	O-ring Seals, Kalrez	349	4079 Kalrez	4.895	4.475	0.210	Black	O-K349
	O-ring Seals, Kalrez	350	4079 Kalrez	5.020	4.600	0.210	Black	O-K350
	O-ring Seals, Kalrez	351	4079 Kalrez	5.145	4.725	0.210	Black	O-K351
	O-ring Seals, Kalrez	352	4079 Kalrez	5.270	4.850	0.210	Black	O-K352
	O-ring Seals, Kalrez	353	4079 Kalrez	5.395	4.975	0.210	Black	O-K353
	O-ring Seals, Kalrez	354	4079 Kalrez	5.520	5.100	0.210	Black	O-K354
	O-ring Seals, Kalrez	355	4079 Kalrez	5.645	5.225	0.210	Black	O-K355
	O-ring Seals, Kalrez	356	4079 Kalrez	5.770	5.350	0.210	Black	O-K356
	O-ring Seals, Kalrez	357	4079 Kalrez	5.895	5.475	0.210	Black	O-K357
	O-ring Seals, Kalrez	358	4079 Kalrez	6.020	5.600	0.210	Black	O-K358
	O-ring Seals, Kalrez	359	4079 Kalrez	6.145	5.725	0.210	Black	O-K359
	O-ring Seals, Kalrez	360	4079 Kalrez	6.270	5.850	0.210	Black	O-K360
	O-ring Seals, Kalrez	361	4079 Kalrez	6.395	5.975	0.210	Black	O-K361
	O-ring Seals, Kalrez	362	4079 Kalrez	6.645	6.225	0.210	Black	O-K362
	O-ring Seals, Kalrez	363	4079 Kalrez	6.895	6.475	0.210	Black	O-K363
	O-ring Seals, Kalrez	364	4079 Kalrez	7.145	6.725	0.210	Black	O-K364
	O-ring Seals, Kalrez	365	4079 Kalrez	7.395	6.975	0.210	Black	O-K365
	O-ring Seals, Kalrez	366	4079 Kalrez	7.645	7.225	0.210	Black	O-K366
	O-ring Seals, Kalrez	367	4079 Kalrez	7.895	7.475	0.210	Black	O-K367
	O-ring Seals, Kalrez	368	4079 Kalrez	8.145	7.725	0.210	Black	O-K368
	O-ring Seals, Kalrez	369	4079 Kalrez	8.395	7.975	0.210	Black	O-K369
	O-ring Seals, Kalrez	370	4079 Kalrez	8.645	8.225	0.210	Black	O-K370
	O-ring Seals, Kalrez	371	4079 Kalrez	8.895	8.475	0.210	Black	O-K371
	O-ring Seals, Kalrez	372	4079 Kalrez	9.145	8.725	0.210	Black	O-K372
	O-ring Seals, Kalrez	373	4079 Kalrez	9.395	8.975	0.210	Black	O-K373
	O-ring Seals, Kalrez	374	4079 Kalrez	9.645	9.225	0.210	Black	O-K374
	O-ring Seals, Kalrez	375	4079 Kalrez	9.895	9.475	0.210	Black	O-K375
	O-ring Seals, Kalrez	376	4079 Kalrez	10.145	9.725	0.210	Black	O-K376
	O-ring Seals, Kalrez	377	4079 Kalrez	10.395	9.975	0.210	Black	O-K377
	O-ring Seals, Kalrez	378	4079 Kalrez	10.895	10.475	0.210	Black	O-K378
	O-ring Seals, Kalrez	379	4079 Kalrez	11.395	10.975	0.210	Black	O-K379
	O-ring Seals, Kalrez	380	4079 Kalrez	11.895	11.475	0.210	Black	O-K380
	O-ring Seals, Kalrez	381	4079 Kalrez	12.395	11.975	0.210	Black	O-K381
	O-ring Seals, Kalrez	382	4079 Kalrez	13.395	12.975	0.210	Black	O-K382
	O-ring Seals, Kalrez	383	4079 Kalrez	14.395	13.975	0.210	Black	O-K383
	O-ring Seals, Kalrez	384	4079 Kalrez	15.395	14.975	0.210	Black	O-K384
	O-ring Seals, Kalrez	385	4079 Kalrez	16.375	15.955	0.210	Black	O-K385
	O-ring Seals, Kalrez	386	4079 Kalrez	17.375	16.955	0.210	Black	O-K386
	O-ring Seals, Kalrez	387	4079 Kalrez	18.375	17.955	0.210	Black	O-K387
	O-ring Seals, Kalrez	388	4079 Kalrez	19.375	18.955	0.210	Black	O-K388
	O-ring Seals, Kalrez	389	4079 Kalrez	20.375	19.955	0.210	Black	O-K389
	O-ring Seals, Kalrez	390	4079 Kalrez	21.375	20.955	0.210	Black	O-K390
	O-ring Seals, Kalrez	391	4079 Kalrez	22.375	21.955	0.210	Black	O-K391
	O-ring Seals, Kalrez	392	4079 Kalrez	23.360	22.940	0.210	Black	O-K392
	O-ring Seals, Kalrez	393	4079 Kalrez	24.360	23.940	0.210	Black	O-K393
	O-ring Seals, Kalrez	394	4079 Kalrez	25.360	24.940	0.210	Black	O-K394
	O-ring Seals, Kalrez	395	4079 Kalrez	26.360	25.940	0.210	Black	O-K395