What factors should I consider when choosing the right sputtering target?

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Do you offer custom sputtering targets or evaporation materials?

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Can you provide advice on the optimal material for a specific thin film application?

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Can you supply small quantities of materials for research and development purposes?

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.

Perfluoroelastomer (FFKM) Kalrez® O-rings (0.275 Section)

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.275 Section): High-Performance Seals for Semiconductor and Plasma Applications

Perfluoroelastomer (FFKM) Kalrez® O-Rings (0.275 section) from TFM are engineered for extreme sealing performance in semiconductor, plasma, and chemical processing environments. Manufactured using Kalrez® 4079, these O-rings are formulated to resist aggressive chemicals while withstanding long-term thermal exposure up to 316°C, and even higher temperatures for short durations.

With a cross-sectional thickness of 0.275 inches, these O-rings are ideal for static sealing in reactive plasma chambers, CVD/PVD tools, and etching systems where chemical purity, low weight loss, and excellent mechanical integrity are essential.

Kalrez® 4079 offers low compression set, minimal particle generation, and exceptional resistance to thermal cycling, making it a top choice for equipment used in dry or wet semiconductor processes. However, it is not recommended for use with hot water, steam, or contact with hot aliphatic amines, ethylene oxide, or propylene oxide.

Product Specifications:

Material Grade: Kalrez® 4079 (Perfluoroelastomer, FFKM)
Color: Black
Durometer Hardness: 75 Shore A
Cross-Section: 0.275 inches
Temperature Range: –19°C to +316°C (continuous), higher for short exposure

Key Benefits:

Exceptional Chemical Resistance to acids, bases, solvents, and reactive plasmas
Thermal Stability up to 316°C continuous service
Excellent Compression Set Resistance for long-term static sealing
Low Outgassing & Weight Loss, ideal for vacuum and plasma systems
Engineered for Semiconductor Use, supporting both dry and wet process steps

Not Recommended For:

Hot water or steam exposure
Aliphatic amines at elevated temperatures
Ethylene oxide or propylene oxide contact

Common Applications:

Semiconductor manufacturing tools: Etch, deposition, ashing
Vacuum chamber seals in high-temperature chemical processing
Analytical instruments operating under harsh chemical exposure
O-rings for CVD/PVD processing, dry etching, and gas delivery systems

TFM’s Kalrez® FFKM O-Rings (0.275 section) provide industry-leading performance where high purity, thermal resilience, and chemical resistance are mission critical—delivering confidence in even the harshest sealing environments.

Ordering Table

Drawing	Reference	O-Ring Size	O-Ring Material	O-Ring OD	O-Ring ID	O-Ring Cross Section	O-Ring Color	Part Number
	O-ring Seals, Kalrez	400	4079 Kalrez	1.900	1.350	0.275	Black	O-K400
	O-ring Seals, Kalrez	401	4079 Kalrez	2.025	1.475	0.275	Black	O-K401
	O-ring Seals, Kalrez	402	4079 Kalrez	2.150	1.600	0.275	Black	O-K402
	O-ring Seals, Kalrez	403	4079 Kalrez	2.275	1.725	0.275	Black	O-K403
	O-ring Seals, Kalrez	404	4079 Kalrez	2.400	1.850	0.275	Black	O-K404
	O-ring Seals, Kalrez	405	4079 Kalrez	2.525	1.975	0.275	Black	O-K405
	O-ring Seals, Kalrez	406	4079 Kalrez	2.650	2.100	0.275	Black	O-K406
	O-ring Seals, Kalrez	407	4079 Kalrez	2.775	2.225	0.275	Black	O-K407
	O-ring Seals, Kalrez	408	4079 Kalrez	2.900	2.350	0.275	Black	O-K408
	O-ring Seals, Kalrez	409	4079 Kalrez	3.025	2.475	0.275	Black	O-K409
	O-ring Seals, Kalrez	410	4079 Kalrez	3.150	2.600	0.275	Black	O-K410
	O-ring Seals, Kalrez	411	4079 Kalrez	3.275	2.725	0.275	Black	O-K411
	O-ring Seals, Kalrez	412	4079 Kalrez	3.400	2.850	0.275	Black	O-K412
	O-ring Seals, Kalrez	413	4079 Kalrez	3.525	2.975	0.275	Black	O-K413
	O-ring Seals, Kalrez	414	4079 Kalrez	3.650	3.100	0.275	Black	O-K414
	O-ring Seals, Kalrez	415	4079 Kalrez	3.775	3.225	0.275	Black	O-K415
	O-ring Seals, Kalrez	416	4079 Kalrez	3.900	3.350	0.275	Black	O-K416
	O-ring Seals, Kalrez	417	4079 Kalrez	4.025	3.475	0.275	Black	O-K417
	O-ring Seals, Kalrez	418	4079 Kalrez	4.150	3.600	0.275	Black	O-K418
	O-ring Seals, Kalrez	419	4079 Kalrez	4.275	3.725	0.275	Black	O-K419
	O-ring Seals, Kalrez	420	4079 Kalrez	4.400	3.850	0.275	Black	O-K420
	O-ring Seals, Kalrez	421	4079 Kalrez	4.525	3.975	0.275	Black	O-K421
	O-ring Seals, Kalrez	422	4079 Kalrez	4.650	4.100	0.275	Black	O-K422
	O-ring Seals, Kalrez	423	4079 Kalrez	4.775	4.225	0.275	Black	O-K423
	O-ring Seals, Kalrez	424	4079 Kalrez	4.900	4.350	0.275	Black	O-K424
	O-ring Seals, Kalrez	425	4079 Kalrez	5.025	4.475	0.275	Black	O-K425
	O-ring Seals, Kalrez	426	4079 Kalrez	5.150	4.600	0.275	Black	O-K426
	O-ring Seals, Kalrez	427	4079 Kalrez	5.275	4.725	0.275	Black	O-K427
	O-ring Seals, Kalrez	428	4079 Kalrez	5.400	4.850	0.275	Black	O-K428
	O-ring Seals, Kalrez	429	4079 Kalrez	5.525	4.975	0.275	Black	O-K429
	O-ring Seals, Kalrez	430	4079 Kalrez	5.650	5.100	0.275	Black	O-K430
	O-ring Seals, Kalrez	431	4079 Kalrez	5.775	5.225	0.275	Black	O-K431
	O-ring Seals, Kalrez	432	4079 Kalrez	5.900	5.350	0.275	Black	O-K432
	O-ring Seals, Kalrez	433	4079 Kalrez	6.025	5.475	0.275	Black	O-K433
	O-ring Seals, Kalrez	434	4079 Kalrez	6.150	5.600	0.275	Black	O-K434
	O-ring Seals, Kalrez	435	4079 Kalrez	6.275	5.725	0.275	Black	O-K435
	O-ring Seals, Kalrez	436	4079 Kalrez	6.400	5.850	0.275	Black	O-K436
	O-ring Seals, Kalrez	437	4079 Kalrez	6.525	5.975	0.275	Black	O-K437
	O-ring Seals, Kalrez	438	4079 Kalrez	6.775	6.225	0.275	Black	O-K438
	O-ring Seals, Kalrez	439	4079 Kalrez	7.025	6.475	0.275	Black	O-K439
	O-ring Seals, Kalrez	440	4079 Kalrez	7.275	6.725	0.275	Black	O-K440
	O-ring Seals, Kalrez	441	4079 Kalrez	7.525	6.975	0.275	Black	O-K441
	O-ring Seals, Kalrez	442	4079 Kalrez	7.775	7.225	0.275	Black	O-K442
	O-ring Seals, Kalrez	443	4079 Kalrez	8.025	7.475	0.275	Black	O-K443
	O-ring Seals, Kalrez	444	4079 Kalrez	8.275	7.725	0.275	Black	O-K444
	O-ring Seals, Kalrez	445	4079 Kalrez	8.525	7.975	0.275	Black	O-K445
	O-ring Seals, Kalrez	446	4079 Kalrez	9.025	8.475	0.275	Black	O-K446
	O-ring Seals, Kalrez	447	4079 Kalrez	9.525	8.975	0.275	Black	O-K447
	O-ring Seals, Kalrez	448	4079 Kalrez	10.025	9.475	0.275	Black	O-K448
	O-ring Seals, Kalrez	449	4079 Kalrez	10.525	9.975	0.275	Black	O-K449
	O-ring Seals, Kalrez	450	4079 Kalrez	11.025	10.475	0.275	Black	O-K450
	O-ring Seals, Kalrez	451	4079 Kalrez	11.525	10.975	0.275	Black	O-K451
	O-ring Seals, Kalrez	452	4079 Kalrez	12.025	11.475	0.275	Black	O-K452
	O-ring Seals, Kalrez	453	4079 Kalrez	12.525	11.975	0.275	Black	O-K453
	O-ring Seals, Kalrez	454	4079 Kalrez	13.025	12.475	0.275	Black	O-K454
	O-ring Seals, Kalrez	455	4079 Kalrez	13.525	12.975	0.275	Black	O-K455
	O-ring Seals, Kalrez	456	4079 Kalrez	14.007	13.457	0.275	Black	O-K456
	O-ring Seals, Kalrez	457	4079 Kalrez	14.525	13.975	0.275	Black	O-K457
	O-ring Seals, Kalrez	458	4079 Kalrez	15.025	14.475	0.275	Black	O-K458
	O-ring Seals, Kalrez	459	4079 Kalrez	15.525	14.975	0.275	Black	O-K459
	O-ring Seals, Kalrez	460	4079 Kalrez	16.025	15.475	0.275	Black	O-K460
	O-ring Seals, Kalrez	461	4079 Kalrez	16.505	15.955	0.275	Black	O-K461
	O-ring Seals, Kalrez	462	4079 Kalrez	17.005	16.455	0.275	Black	O-K462
	O-ring Seals, Kalrez	463	4079 Kalrez	17.505	16.955	0.275	Black	O-K463
	O-ring Seals, Kalrez	464	4079 Kalrez	18.005	17.455	0.275	Black	O-K464
	O-ring Seals, Kalrez	465	4079 Kalrez	18.505	17.955	0.275	Black	O-K465
	O-ring Seals, Kalrez	466	4079 Kalrez	19.005	18.455	0.275	Black	O-K466
	O-ring Seals, Kalrez	467	4079 Kalrez	19.505	18.955	0.275	Black	O-K467
	O-ring Seals, Kalrez	468	4079 Kalrez	20.005	19.455	0.275	Black	O-K468
	O-ring Seals, Kalrez	469	4079 Kalrez	20.505	19.955	0.275	Black	O-K469
	O-ring Seals, Kalrez	470	4079 Kalrez	21.505	20.955	0.275	Black	O-K470
	O-ring Seals, Kalrez	471	4079 Kalrez	22.505	21.955	0.275	Black	O-K471
	O-ring Seals, Kalrez	472	4079 Kalrez	23.490	22.940	0.275	Black	O-K472
	O-ring Seals, Kalrez	473	4079 Kalrez	24.490	23.940	0.275	Black	O-K473
	O-ring Seals, Kalrez	474	4079 Kalrez	25.490	24.940	0.275	Black	O-K474
	O-ring Seals, Kalrez	475	4079 Kalrez	26.490	25.940	0.275	Black	O-K475