Features
These components are reliable and economical general-purpose solutions designed for High Vacuum (HV) and Ultra High Vacuum (UHV) applications, focusing on cleanliness and corrosion resistance.
In the Open Position:
When the valve is open, the edge-welded bellows and valve seat retract from the gas path, ensuring high conductance.
Key Specifications:
- Leak Rate: The valves maintain a leak rate of 2 × 10⁻⁹ mbar L/s across the seat, ensuring optimal performance.
- Pressure Range:
- Maximum Pressure: Atmospheric pressure
- Minimum Pressure: 1 × 10⁻⁹ Torr
- Sealing Technology: Includes fluorocarbon o-ring seat seals, bellows-sealed shafts, and bonnet seals. For applications requiring higher temperature bakeout and improved ultimate vacuum, copper options are available.
- Actuation Options: Can be configured for manual or pneumatic actuation for versatile use.
- Maintenance Convenience: Normal repairs can be performed without needing to remove the valve body from the system, simplifying maintenance processes.
Specifications Table
Manufacturer | TFM |
---|---|
Pressure | Torr Min: 1.000 x 10-9 Torr Max: 760 Torrmbar 1.330 x 10-9 mbar atm 1.00 atm |
Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºF Open Bake |
Actuator Type | Pneumatic Single Acting |
Solenoid Kit Included | No |
Position Indicators | No |
Bonnet Seal Type | Viton |
Valve Body Material | 304L SS |
Valve Seal Material | Viton |
Shaft Seal | Bellows |
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