Overview of TFM Viewport Shutters
TFM viewport shutters are essential components designed to protect viewports from material deposition, ensuring optimal visibility and functionality. These shutters offer several key features that enhance their performance and reliability in demanding environments.
Key Features of TFM Viewport Shutters
- Protection Against Deposition: The shutters effectively prevent deposition materials from accumulating on the viewports, safeguarding them from damage and maintaining clarity.
- Safe Operation Protocol: The shutters are engineered to remain closed during deposition processes, opening only under safe conditions, which contributes to the integrity of the equipment.
- High-Pressure Capability: They can operate at base pressures below 10^-9 Torr, making them suitable for ultra-high vacuum applications.
- Temperature Tolerance: These shutters are bakeable up to 250°C, allowing for effective cleaning and maintenance procedures without compromising their structural integrity.
Pneumatic Features of TFM Viewport Shutters
The pneumatic mechanism of TFM viewport shutters adds another layer of functionality, ensuring efficient operation in various settings.
- Solenoid-Operated Valve System: The shutters utilize a solenoid-operated spool valve that switches compressed gas between actuator ports. This design enables the shutters to sweep when energized and return to a closed position when de-energized (note: the solenoid is not included).
- Adjustable Sweep Mechanism: The pneumatic actuator includes adjustable stops that allow users to fine-tune the sweep range according to specific operational needs.
- Air Pressure Regulation: Flow regulators are integrated at each port to maintain consistent air pressure, enhancing the reliability of the system.
- Easy Maintenance: The actuator assembly can be conveniently removed using two cap screws, facilitating bakeout processes and maintenance.
- Maximum Input Pressure: The system operates efficiently with a maximum input air pressure of 98 psi, ensuring robust performance.
These features make TFM viewport shutters an excellent choice for environments requiring high precision and reliability, particularly in applications such as semiconductor manufacturing and research laboratories.
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