Product Overview
Stainless Steel Sputtering Target is a composition-specific sputtering target for thin-film deposition and PVD process development. The practical specification normally includes chemistry, purity, dimensions, density, target configuration, and any bonding or backing requirement needed by the sputtering cathode.
Material and Deposition Characteristics
Power mode and process conditions should be selected according to the target conductivity, thermal behavior, and the requirements of the cathode system. For less common materials, conservative initial power density and film-composition verification are good practice.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Alloy Grade | 304 / 316 / 316L / 430 (custom) | Determines corrosion & mechanical properties |
| Purity | Industrial grade or customized | Ensures consistent film composition |
| Diameter | 25 – 300 mm (custom) | Matches sputtering system holders |
| Thickness | 3 – 8 mm | Influences target lifetime |
| Density | ≥ 99% theoretical | Reduces particle generation |
| Bonding | Copper backing plate (optional) | Improves heat transfer & stability |
| Material | Key Advantage | Typical Application |
|---|---|---|
| Stainless Steel | Corrosion resistance & cost efficiency | Protective & decorative coatings |
| Pure Iron (Fe) | High magnetic response | Magnetic films |
| Nickel (Ni) | Good corrosion resistance | Functional metallic layers |
| Chromium (Cr) | Hardness & adhesion | Hard coatings |
| Question | Answer |
|---|---|
| Can specific stainless steel grades be supplied? | Yes, common grades such as 304 and 316L are available, along with custom alloys. |
| Is copper backing recommended? | For high-power or continuous sputtering, bonded targets are recommended for better heat management. |
| Are rotary targets available? | Yes, both planar and rotary configurations can be manufactured. |
| What sputtering method is suitable? | DC magnetron sputtering is typically used due to its conductivity. |
| How are the targets packaged? | Vacuum-sealed and securely packed in export-grade cartons or wooden crates. |
Typical Thin-Film Applications
- Thin-film research and materials-development projects requiring a composition-specific sputtering source
- Semiconductor, optical, energy, electronic, or laboratory coatings depending on the material system
- Custom R&D work where target composition, purity, and geometry need to be specified together
Target Configuration and Ordering Considerations
For quotation and manufacturability review, provide target size, thickness, purity or alloy composition, quantity, and the sputtering gun or cathode model if known. If a bonded assembly is required, include backing-plate material, bonding preference, and any dimensional tolerances, surface-finish needs, or inspection-document requirements. TFM can also review customer drawings or old-target samples for replacement builds.
Frequently Asked Questions
What is the main reason to use a Stainless Steel sputtering target?
It provides a composition-specific source for thin-film deposition when the target material itself is important to the desired film chemistry or process.
How should the sputtering mode for Stainless Steel be selected?
The power mode should be chosen according to target conductivity, thermal behavior, and equipment capability. Less-conductive materials are commonly evaluated with RF power.
Why are density and microstructure important for Stainless Steel targets?
These factors can influence erosion stability, thermal behavior, particle generation, and the risk of cracking or local hot spots.
Can Stainless Steel be supplied with a backing plate?
Yes. If the material is brittle or the cathode requires it, a bonded configuration can be reviewed according to target size, thickness, cooling, and power.
Does target composition always equal film composition?
No. Film chemistry may differ because of sputtering yields, process conditions, substrate temperature, re-sputtering, and chamber history. Film verification is recommended when composition matters.
What should I provide to request a quotation for Stainless Steel?
Please provide the composition, purity, dimensions, quantity, target configuration, cathode details, and any drawing or inspection requirements.
Reviews
There are no reviews yet.