Product Overview
Terbium Iron Cobalt Sputtering Target (Tb-Fe-Co) is a composition-specific sputtering target for thin-film deposition and PVD process development. The practical specification normally includes chemistry, purity, dimensions, density, target configuration, and any bonding or backing requirement needed by the sputtering cathode.
Material and Deposition Characteristics
Power mode and process conditions should be selected according to the target conductivity, thermal behavior, and the requirements of the cathode system. For less common materials, conservative initial power density and film-composition verification are good practice.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Purity | 99.9% – 99.99% (metals basis) | Reduces magnetic impurities and improves film stability |
| Composition | Custom atomic ratio (e.g., Tb 20–30%) | Controls coercivity and compensation temperature |
| Density | ≥ 98–99% of theoretical | Minimizes arcing and ensures stable sputtering |
| Diameter | 25 – 200 mm (custom available) | Matches sputtering system holders |
| Thickness | 3 – 6 mm (typical) | Influences target lifetime |
| Bonding | Copper backing plate (optional) | Improves heat dissipation and structural stability |
| Material | Key Advantage | Typical Application |
|---|---|---|
| Tb-Fe-Co | Strong perpendicular anisotropy & MOKE response | Magneto-optical storage |
| Gd-Fe-Co | Tunable compensation temperature | Magnetic switching research |
| Co-Pt | High magnetic anisotropy | Perpendicular recording |
| Fe-Co | High saturation magnetization | Magnetic cores & sensors |
| Question | Answer |
|---|---|
| Can the Tb-Fe-Co composition be customized? | Yes, the Tb, Fe, and Co atomic ratios can be precisely tailored to achieve desired magnetic properties. |
| Is the target suitable for DC or RF sputtering? | Typically DC magnetron sputtering is used due to the metallic nature of the alloy. |
| Does the target require backing plate bonding? | For higher power or larger diameters, copper backing plates are recommended to enhance thermal management. |
| What is the typical film structure? | Tb-Fe-Co films are generally amorphous when sputtered under standard conditions. |
| How is the product packaged? | Vacuum-sealed with protective cushioning and export-grade cartons or wooden crates. |
Typical Thin-Film Applications
- Thin-film research and materials-development projects requiring a composition-specific sputtering source
- Semiconductor, optical, energy, electronic, or laboratory coatings depending on the material system
- Custom R&D work where target composition, purity, and geometry need to be specified together
Target Configuration and Ordering Considerations
For quotation and manufacturability review, provide target size, thickness, purity or alloy composition, quantity, and the sputtering gun or cathode model if known. If a bonded assembly is required, include backing-plate material, bonding preference, and any dimensional tolerances, surface-finish needs, or inspection-document requirements. TFM can also review customer drawings or old-target samples for replacement builds.
Frequently Asked Questions
What is the main reason to use a Terbium Iron Cobalt sputtering target?
It provides a composition-specific source for thin-film deposition when the target material itself is important to the desired film chemistry or process.
How should the sputtering mode for Terbium Iron Cobalt be selected?
The power mode should be chosen according to target conductivity, thermal behavior, and equipment capability. Less-conductive materials are commonly evaluated with RF power.
Why are density and microstructure important for Terbium Iron Cobalt targets?
These factors can influence erosion stability, thermal behavior, particle generation, and the risk of cracking or local hot spots.
Can Terbium Iron Cobalt be supplied with a backing plate?
Yes. If the material is brittle or the cathode requires it, a bonded configuration can be reviewed according to target size, thickness, cooling, and power.
Does target composition always equal film composition?
No. Film chemistry may differ because of sputtering yields, process conditions, substrate temperature, re-sputtering, and chamber history. Film verification is recommended when composition matters.
What should I provide to request a quotation for Terbium Iron Cobalt?
Please provide the composition, purity, dimensions, quantity, target configuration, cathode details, and any drawing or inspection requirements.




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