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V44 Series Soft Start Valves

Applications

The V44 Series Soft Start Valves are ideal for a range of applications, including:

  • Plasma Etching
  • Chemical Vapor Deposition (CVD)
  • Sputter Deposition
  • Solar Panel Manufacturing
  • Semiconductor Processing
  • LCD and Flat Panel Production
  • Various Cluster Vacuum Systems

These valves enhance system performance and reliability across diverse industries.

Features

  • Pneumatic Actuator: Comes equipped with position indicators for precise control.
  • Two-Step Pumping: Offers the option for soft or fast pumping, providing flexibility in operation.
  • Configuration Options: Available in both inline and right-angle configurations to suit various setups.
  • Long Cycle Life: With a life span of over 100,000 cycles and easy maintenance, these valves help reduce overall cost of ownership.
  • Standard Sizes: Offered in ISO 25 to ISO 200 sizes.

Options

  • Custom Sizes: Available to meet specific application requirements.
  • Bellows Materials: Choose from SS316L or Inconel, depending on your needs.
  • O-Ring Compounds: Options include Kalrez®, Chemraz®, and others for enhanced compatibility with different chemicals.

Specifications Table

Temperature (°C)Valve body: 120°C
Valve actuator: 80°C
Pressure Range (torr)1 X 10-9 mbar – ATM
Differential Press (torr)≤ 1.2 bar in either direction
MaterialValve Body: 304SS
Gate: 304SS
Bonnet Seal: AL6061
Welded Bellows: AM350
Valve Actuator: 304SS, AL6061
Seal MaterialFluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec)<1 X 10-9 mbar. l/s
Cycles Until Service (approx.)≥ 1 million
Position IndicatorSMC D-A93
OperationDouble acting

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FAQ

Sputtering targets are materials used in thin-film deposition processes to create coatings on substrates. They are used in industries like semiconductors, optics, photovoltaics, and electronics.

Evaporation materials are used in Physical Vapor Deposition (PVD) processes, where materials are heated and evaporated to form a thin film on a substrate. These are critical for applications in optics, wear protection, and decorative coatings.

Boat crucibles are used as containers for evaporation materials during PVD processes. They help to uniformly evaporate materials onto the substrate for thin film formation.

Sputtering uses energetic particles to eject material from a target, while evaporation involves heating a material until it vaporizes and deposits on a substrate. Both are common methods in Physical Vapor Deposition (PVD) for creating thin films.

Consider the material composition, purity, target size, and application-specific requirements such as the thickness and uniformity of the film.

Yes, we offer customized sputtering targets, evaporation materials, and crucibles to meet specific customer requirements for size, material composition, and purity.

Yes, we can assist in selecting the most suitable material based on your application, whether it’s for optical coatings, semiconductor fabrication, or decorative finishes.

Yes, we offer both bulk and small quantities of sputtering targets, evaporation materials, and spherical powders to support research, prototyping, and development projects.

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