Product Overview
Zirconium Boride Sputtering Target (ZrB2) is a compound sputtering target used to deposit thin films where a specific pre-compounded chemistry is required. These materials can behave differently from conductive metallic targets in terms of electrical response, thermal shock resistance, density sensitivity, and cracking risk, so target dimensions, density, backing design, and sputtering mode should be considered together.
Material and Deposition Characteristics
The appropriate sputtering mode depends on target conductivity, thermal behavior, and the power-supply configuration. Many compound ceramic targets are evaluated first with RF magnetron sputtering, especially when electrical resistivity is high. For brittle or low-thermal-conductivity materials, density, backing support, and stable cooling are important for reliable operation.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Chemical Formula | ZrB₂ | Defines material composition |
| Purity | 99.5% – 99.9% | Ensures film performance |
| Density | ≥ 95% – 99% theoretical | Stable sputtering behavior |
| Melting Point | ~3245°C | High-temperature capability |
| Diameter | 50 – 200 mm (custom available) | System compatibility |
| Thickness | 3 – 6 mm | Influences target lifetime |
| Electrical Type | Conductive | Supports DC sputtering |
| Bonding | Cu backing / In / elastomer | Improves thermal management |
| Material | Key Advantage | Typical Application |
|---|---|---|
| ZrB₂ | Ultra-high temperature & hardness | Aerospace coatings |
| TiB₂ | High hardness, lower cost | Wear-resistant coatings |
| ZrC | Excellent thermal resistance | High-temp applications |
| HfB₂ | Superior oxidation resistance | Extreme environments |
| Question | Answer |
|---|---|
| Can ZrB₂ be sputtered using DC power? | Yes, due to its electrical conductivity, DC magnetron sputtering is suitable. |
| Is bonding recommended? | For high-power applications, copper backing plates are recommended. |
| What are the main advantages of ZrB₂ coatings? | High hardness, thermal stability, and chemical resistance. |
| Can sizes and shapes be customized? | Yes, targets can be tailored to specific system requirements. |
| Which industries use ZrB₂ most? | Aerospace, semiconductor, and advanced coatings industries. |
Typical Thin-Film Applications
- Compound thin films for semiconductor, optical, protective, hard-coating, and functional-material research
- Applications where a pre-compounded target is preferred over co-sputtering separate elemental targets
- Projects requiring controlled chemistry and tailored target geometry for PVD development
Target Configuration and Ordering Considerations
When requesting a quotation, provide target diameter or rectangular dimensions, thickness, purity or composition, required quantity, and whether a backing plate or bonded assembly is needed. For brittle ceramic or compound targets, it is useful to specify the cathode model, backing-plate material, preferred bonding method, operating power if known, and any density, tolerance, or inspection-document requirements. TFM can review drawings, old-target photos, and application details when custom dimensions are required.
Frequently Asked Questions
What is the main reason to use a Zirconium Boride sputtering target?
It provides a composition-specific source for depositing thin films when the required chemistry is better introduced from a pre-compounded target than from co-sputtering separate elements.
How should the sputtering mode for Zirconium Boride be selected?
The power mode should be selected from target conductivity, thermal behavior, and equipment capability. Many compound ceramic targets are first evaluated with RF magnetron sputtering.
Why are density and microstructure important for Zirconium Boride targets?
Uniform density and microstructure help support stable erosion and thermal behavior, while pores or local defects can increase the risk of cracking, particles, or unstable plasma.
Can a Zirconium Boride target be supplied with a backing plate?
Yes. Where the material is brittle or the cathode requires a backing assembly, bonded configurations can be reviewed according to target size, thickness, cooling, and operating power.
Does target composition always equal film composition?
No. Film chemistry can shift because of different sputtering yields, reactive conditions, substrate temperature, re-sputtering, or chamber history. Verify the film when the chemistry is critical.
What should I provide to request a quotation for Zirconium Boride?
Please provide material composition, purity, dimensions, quantity, target or backing configuration, cathode model or system details, and any drawing, tolerance, or inspection requirements.
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