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Gate Valves

TFM provides a wide selection of valves designed for a broad range of vacuum conditions, from coarse to ultra-high vacuum pressures. These valves are available in both manual and pneumatic configurations, with multiple size options and various flange types to meet diverse operational needs.
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Angle Valves

A wide selection of angle valves is available to accommodate pressure conditions ranging from coarse to extreme ultra-high vacuum. These valves come in manual, pneumatic, and electromagnetically actuated models, providing multiple control options. Standard configurations include various sizes and flange types to ensure compatibility with different system requirements.
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Inline Valves

Inline valves offer many of the same characteristics and applications as angle valves. However, a key distinction is that one of the ports is rotated 90 degrees, aligning its axis parallel to the axis of the other port. This design allows for a streamlined flow path, making inline valves particularly effective in various fluid control scenarios.
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Pendulum Valves

Designed to handle pressure ranges from coarse to high vacuum, these valves are an excellent choice for installations with limited space. Their compact design makes them ideal for areas where traditional gate valves may be too large or difficult to fit. These valves offer reliable performance while accommodating tight geometric constraints.
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All-Metal Valves

All-metal valves, featuring metal bonnet seals and metal vacuum seals, are specifically designed for various ultra-high vacuum (UHV) and extreme UHV applications. These valves are ideal for environments where temperature fluctuations make elastomer seal valves unsuitable. Their robust construction ensures reliable operation under challenging conditions, providing an effective solution for critical applications.
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Ball Valves

Ball valves provide resiliency that other valves may struggle to handle, stainless steel ball valves are the standard and most commonly used.

 
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Butterfly & Control Valves

Conductance controllers are specifically designed for applications requiring consistent and responsive pressure control. These units utilize stepper motor actuation, allowing for precise adjustments. Equipped with an onboard control package, they offer integrated functionality, making them an ideal solution for maintaining optimal pressure in various systems.
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Inline Check Valves
Inline check valves play a crucial role in vacuum systems, serving multiple functions. They help reduce pumping speed during soft start operations, prevent air influx when pumps are powered down, and protect against turbulence in piping and chambers. These valves ensure smooth operation and enhance the overall efficiency and reliability of vacuum systems.
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Diaphragm Valves
Diaphragm valves offer a cost-effective solution for venting, rough metering, and isolation in vacuum systems. Their robust design makes them well-suited for handling corrosive gases and liquids. Available in Buna-N and fluorocarbon diaphragm options, these valves provide flexibility to meet diverse chemical compatibility needs, ensuring reliable performance in various applications.
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Exhaust Check Valves
TFM provides exhaust check valves designed to prevent air from entering a vacuum pump or system when the pump is powered down. These valves are available in two configurations: vertical mount ball type and flexible mounting spring type. This variety ensures that you can select the best option for your specific installation needs, enhancing the reliability and efficiency of your vacuum system.
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Up to Air Vent Valves
Up to air vent valves are versatile solutions for managing chamber pressure. They can be used to vent a chamber to the atmosphere or function as a gas inlet for backfilling purposes. Designed for installation on KF and CF flanges, these valves feature a bellows-sealed, manually actuated design, ensuring reliable operation and effective control over chamber environments.
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Solenoids & Fittings for Vacuum Valves
A list of necessary solenoids and NPT fittings for our pneumatically-actuated vacuum valves.
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Gas Valves & Accessories
  • Shut-off, metering, or needle style valves
  • Manual control
  • Multiple flange/fittings styles
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Rectangular Gate Valves
TFM Rectangular Gate Valves are ideal for load lock and process module isolation. They come in various models, including Dual Housing, Door (housing-less), and Integrated Heater options.
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Semiconductor Process Valves

TFM offers a comprehensive line of valves suited specifically for semiconductor processes, including rectangular, gate and angle valves.

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