Introduction
CF flanged stainless steel fluorocarbon bonnet bellows sealed gate valves (pneumatic) are designed for ultra-high vacuum (UHV) and high-purity gas control systems where leak integrity and contamination control are critical. By combining all-metal sealing with a fluorocarbon-protected actuator interface, these valves deliver reliable isolation performance in semiconductor processing, thin film deposition, and research vacuum systems.
Detailed Description
These pneumatic gate valves integrate a bellows-sealed stem mechanism with CF (ConFlat®) flanges, ensuring leak rates compatible with UHV environments. The bellows structure isolates the working fluid from the external atmosphere, eliminating dynamic sealing points that could otherwise introduce leaks or contaminants.
The valve body is typically manufactured from high-grade stainless steel (such as 304 or 316L), offering excellent مقاومت to corrosion and outgassing. The CF flange interface uses knife-edge sealing with copper gaskets, ensuring a robust metal-to-metal seal suitable for repeated bake-out cycles.
A fluorocarbon (e.g., FKM/Viton®) bonnet is incorporated within the pneumatic actuator assembly, providing chemical resistance and durability while maintaining flexibility under repeated actuation. The pneumatic drive enables rapid, consistent opening and closing, which is essential for automated vacuum systems and process control.
Key design features include:
Bellows-sealed stem eliminating dynamic leakage paths
CF flange compatibility for UHV sealing with copper gaskets
Pneumatic actuation for fast and repeatable valve operation
Low particle generation suitable for cleanroom environments
Long service life under high-cycle operation
Applications
These valves are widely used in demanding vacuum and gas handling systems:
Semiconductor manufacturing (PVD, CVD, ALD systems)
Thin film deposition systems (sputtering and evaporation lines)
Vacuum furnace and heat treatment systems
Analytical instrumentation and research vacuum chambers
Aerospace and high-purity gas delivery systems
Synchrotron and accelerator vacuum systems
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Valve Type | Bellows Sealed Gate Valve | Ensures zero dynamic leakage |
| Actuation | Pneumatic | Enables automation and fast response |
| Body Material | SS304 / SS316L | Corrosion resistance & low outgassing |
| Flange Type | CF (ConFlat®) | UHV metal sealing |
| Seal Type | Copper gasket (CF), FKM bonnet | Leak-tight and chemical resistance |
| Leak Rate | ≤ 1 × 10⁻¹⁰ mbar·L/s | UHV compatibility |
| Operating Pressure | Vacuum to atmosphere | Wide operating range |
| Bake-out Temperature | Up to 200–250°C | Maintains vacuum cleanliness |
| Cycle Life | >100,000 cycles | Long-term reliability |
Comparison with Related Valve Types
| Valve Type | Key Advantage | Typical Application |
|---|---|---|
| CF Bellows Sealed Gate Valve | Ultra-low leak rate, UHV compatible | Semiconductor & UHV systems |
| KF Manual Gate Valve | Quick installation, cost-effective | Rough vacuum systems |
| ISO Gate Valve | Large aperture, high conductance | Industrial vacuum systems |
| Angle Valve (Pneumatic) | Compact design, fast response | Gas flow control |
FAQ
| Question | Answer |
|---|---|
| Can the valve size be customized? | Yes, CF flange sizes and valve dimensions can be tailored to system requirements. |
| What gases are compatible? | Compatible with most inert and process gases; fluorocarbon bonnet ensures chemical resistance. |
| Is it suitable for cleanroom use? | Yes, low particle generation and clean materials make it ideal for cleanroom environments. |
| What is the typical maintenance interval? | Depends on usage, but bellows design significantly extends maintenance cycles. |
| Can it be integrated into automated systems? | Yes, pneumatic actuation allows seamless integration with PLC and automated control systems. |
Packaging
Our CF Flanged SS Fluorocarbon Bonnet Bellows Sealed Gate Valves (Pneumatic) are meticulously tagged and labeled externally to ensure efficient identification and maintain high standards of quality control. We take great care to prevent any potential damage during storage and transportation, ensuring the valves arrive in perfect condition.
Conclusion
CF flanged pneumatic bellows sealed gate valves provide a dependable solution for UHV and high-purity vacuum systems, combining robust sealing technology with automated operation. Their excellent leak integrity, durability, and compatibility with demanding प्रक्रेस environments make them an essential component in semiconductor, research, and advanced industrial applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | Flange Size | Bonnet Seal Type | Solenoid Kit Included | Part Number |
| DN63CF (4.50" OD) | Fluorocarbon (FKM) | No | GV0250PVCF |
| DN63CF (4.50" OD) | Fluorocarbon (FKM) | No | GV0250PVCFM |
| DN100CF (6.00" OD) | Fluorocarbon (FKM) | No | GV0400PVCF |
| DN100CF (6.00" OD) | Fluorocarbon (FKM) | No | GV0400PVCFM |
| DN160CF (8.00" OD) | Fluorocarbon (FKM) | No | GV0600PVCF |
| DN160CF (8.00" OD) | Fluorocarbon (FKM) | No | GV0600PVCFM |
| DN200CF (10.00" OD) | Fluorocarbon (FKM) | No | GV0800PVCF |
| DN200CF (10.00" OD) | Fluorocarbon (FKM) | No | GV0800PVCFM |
| DN250CF (12.00" OD) | Fluorocarbon (FKM) | No | GV1000PVCF |
| DN250CF (12.00" OD) | Fluorocarbon (FKM) | No | GV1000PVCFM |
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