Micro-Electronics Evaporation Sources
Micro-Electronic Filaments
Tungsten filaments in a variety of shapes and numbers of wires.
Micro-Electronic Basket Heaters
Tungsten basket heaters in varying shapes. Load material directly in basket.
Micro-Electronic Basket Crucible Heaters
Tungsten basket crucible heaters are used with a matching crucible.
Micro-Electronic Shielded Crucible Heaters
Shielded crucible heaters are used with a matching crucible to provide uniform heating.
Micro-Electronic Crucibles
Crucibles to be used in the basket or shielded crucible heaters. Available in a variety of materials.
Micro-Electronic Boat Heaters
Boat heaters available in a variety of styles and materials.
Alumina Coated Micro-Electronic Sources
Alumina coating on boat heaters provides a barrier layer between the evaporant and refractory boat material. Ideal for materials that react with the refractory metals.
Micro-Electronic Box Sources
Tantalum Box heaters can be used for high vapor pressure materials that tend to spit during evaporation.