Product Overview
Aluminum Scandium Evaporation Materials (Al/Sc) is an alloy evaporation material intended for depositing multi-element metallic films. Unlike a pure element, an alloy may not evaporate congruently because its constituents can have different vapor pressures. As a result, source composition, evaporation method, deposition rate, and film-composition verification should be considered together; for very composition-sensitive films, co-evaporation from separate sources may be evaluated.
Evaporation Behavior and Process Considerations
Different alloying elements may evaporate at different rates because their vapor pressures are not identical. This can cause the source surface and deposited film to drift away from the nominal alloy composition during a run. For demanding composition control, film analysis, source replenishment strategy, or co-evaporation from separately controlled sources may be more reliable than assuming one alloy charge will evaporate congruently.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Purity | 99.9% – 99.999% (base Al purity) | Reduces electronic defects |
| Composition | Custom Al/Sc ratio (wt% or at%) | Controls strength & functional properties |
| Form | Pieces / Granules / Pellets | Compatible with evaporation sources |
| Melting Behavior | Composition-dependent (~660°C base Al) | Influences evaporation profile |
| Density | ≥ 99% theoretical | Ensures stable vaporization |
| Packaging | Vacuum-sealed / inert-packed | Prevents oxidation |
| Material | Key Advantage | Typical Application |
|---|---|---|
| Aluminum Scandium (Al/Sc) | Grain refinement & enhanced thermal stability | MEMS & advanced electronics |
| Pure Aluminum (Al) | High conductivity & low density | Interconnect layers |
| Aluminum Copper (Al/Cu) | Improved strength & electromigration resistance | IC metallization |
| Aluminum Silicon (Al/Si) | Good casting and stability characteristics | General coatings |
| Question | Answer |
|---|---|
| Can the scandium content be customized? | Yes, the Sc percentage can be tailored to meet specific electrical or mechanical performance targets. |
| Is the material supplied pre-alloyed? | Yes, standard Al/Sc evaporation materials are pre-alloyed to ensure compositional uniformity. |
| What deposition methods are suitable? | Compatible with thermal and electron beam evaporation systems. |
| Are custom sizes available? | Yes, material form and particle size can be customized based on equipment requirements. |
| Which industries use Al/Sc films most? | Semiconductor manufacturing, MEMS fabrication, RF device development, and advanced materials research. |
Typical Thin-Film Applications
- Composition-tuned alloy films for electrical, magnetic, optical, or mechanical functionality
- Multilayer and thin-film metallization studies
- R&D where alloy ratio or co-evaporation strategy is part of the process design
Source Form and Ordering Considerations
For quotation, provide material, purity, source form, particle or piece size, quantity, evaporation method, and any boat, basket, crucible, or e-beam hearth constraints. If the material will be used for a specific coating stack, sharing the intended film thickness or deposition application can help with source-form selection and packaging recommendations.
Frequently Asked Questions
Will Aluminum Scandium evaporate with the same composition as the bulk alloy?
Not necessarily. Alloy constituents can have different vapor pressures, so the vapor and deposited film may become enriched in the more volatile component as evaporation proceeds.
When is co-evaporation preferable to using a Aluminum Scandium alloy source?
Co-evaporation can be preferable when precise film composition must be maintained independently because separate source rates can be controlled and adjusted during deposition.
Can Aluminum Scandium be evaporated by electron beam?
Often yes, especially when the alloy requires high source temperature. The actual behavior depends on melting, segregation, evaporation rate, and whether the constituents remain sufficiently mixed in the melt.
How should film composition be verified for Aluminum Scandium?
For composition-critical films, analytical verification such as EDS, XRF, XPS, or another appropriate method should be used rather than assuming the film exactly matches the source alloy.
What source form is suitable for Aluminum Scandium evaporation?
Pieces, pellets, or granules may be supplied depending on the source holder. A stable charge geometry helps reduce movement and sudden changes in the heated surface.
What should I include in a Aluminum Scandium evaporation-material RFQ?
Specify alloy ratio, purity basis, source form and size, quantity, evaporation method, and the required film-composition tolerance if it is important.

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