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ST0975 Copper Manganese Nickel Sputtering Target, CuMnNi

Chemical FormulaCuMnNi
Catalog No.ST0975
CAS Number
Purity99.9%, 99.95%, 99.99%, 99.995%, 99.999%
ShapeDiscs, Plates, Column Targets, Step Targets, Custom-made

Known for their exceptional purity and competitive pricing, Copper-Manganese-Nickel sputtering targets from TFM exemplify our commitment to excellence. Drawing on our extensive expertise in materials science, we ensure outstanding performance and reliability through precise craftsmanship in the production of these targets.

Copper Manganese Nickel Sputtering Target

Introduction

The Copper Manganese Nickel (CuMnNi) Sputtering Target is a multi-component alloy designed for advanced thin film deposition applications. By combining the excellent electrical and thermal conductivity of copper with the strength and corrosion resistance of manganese and nickel, this sputtering target provides superior performance for both functional and decorative coatings. Its adaptability makes it suitable for a wide range of industries, including electronics, semiconductors, optics, and energy.

Detailed Description

The CuMnNi sputtering target is engineered with controlled alloy compositions to achieve a balance of conductivity, durability, and chemical resistance.

  • Copper (Cu): Ensures high conductivity and excellent adhesion.

  • Manganese (Mn): Enhances corrosion resistance and contributes to hardness.

  • Nickel (Ni): Improves mechanical strength, wear resistance, and thermal stability.

Produced via powder metallurgy or vacuum melting, the targets are manufactured with uniform density and low impurity levels (purity ≥99.9%). They are available in standard and custom dimensions to match different sputtering systems. Optional bonding with copper, indium, or elastomer backplates ensures stable operation under high-power sputtering conditions.

Applications

The Copper Manganese Nickel sputtering target is widely used in:

  • Semiconductors: Barrier and conductive films in integrated circuits.

  • Magnetic recording media: Thin film deposition for data storage technologies.

  • Optical coatings: Anti-reflective and functional films for precision optics.

  • Energy applications: Thin films for batteries, fuel cells, and solar cells.

  • Decorative coatings: Uniform metallic finishes with enhanced durability.

  • Research & Development: Alloy thin film studies and material property investigations.

Technical Parameters

ParameterTypical Value / RangeImportance
Purity≥99.9%Reduces contamination in films
Diameter25 – 300 mm (custom)Compatible with different sputtering systems
Thickness3 – 6 mmInfluences deposition rate and target life
Density~8.0 g/cm³ (alloy-dependent)Ensures consistent sputtering
BondingIndium, Copper, ElastomerEnhances thermal conductivity and target stability

Comparison with Related Materials

MaterialKey AdvantageTypical Application
Copper Manganese NickelBalanced conductivity & corrosion resistanceElectronics, coatings
Copper Nickel (CuNi)Strong corrosion resistanceMarine & electronic films
Copper Manganese (CuMn)High wear resistanceThin films for durability

FAQ

QuestionAnswer
Can the CuMnNi sputtering target be customized?Yes, alloy ratios, dimensions, and bonding methods can be tailored.
How are these targets packaged?They are vacuum-sealed, protected with foam, and shipped in export-safe cartons or wooden crates.
What industries use CuMnNi targets most?Semiconductor, optics, energy, decorative coating, and R&D.
Do you supply bonded targets?Yes, backing with indium, copper, or elastomer is available.

Packaging

Each Copper Manganese Nickel sputtering target is meticulously labeled, vacuum-sealed, and cushioned with protective materials. Export-safe packaging, including sturdy cartons or wooden crates, ensures safe handling and transportation worldwide.

Conclusion

The Copper Manganese Nickel Sputtering Target offers a reliable solution for industries requiring advanced thin film coatings with excellent durability, corrosion resistance, and conductivity. With customizable compositions and bonding options, it provides flexibility for both research applications and high-volume production.

For detailed specifications and a quotation, please contact us at [sales@thinfilmmaterials.com].

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FAQ

It’s the source material (in solid form) used in sputter deposition to eject atoms or molecules that then form a thin film on a substrate.

Targets can be pure metals (e.g., gold, copper, aluminum), ceramics (e.g., Al₂O₃, SiO₂, TiO₂), alloys, or composites—chosen based on the film’s desired properties.

 

They are produced by processes such as melting/casting for metals or sintering (often with hot isostatic pressing) for ceramics and composite targets to ensure high density and purity.

 

In a vacuum chamber, a plasma (typically argon) bombards the target, ejecting atoms that travel and condense on a substrate, forming a thin film.

 

Key factors include the target’s purity, density, grain structure, and the sputtering yield (i.e. how many atoms are ejected per incident ion), as well as operating conditions like power density and gas pressure.

 

Operators monitor target erosion (often by measuring the depth of the eroded “race track”) or track total energy delivered (kilowatt-hours) until it reaches a threshold that can compromise film quality.

 

Fragile materials (such as many ceramics or certain oxides) and precious metals often require a backing plate to improve cooling, mechanical stability, and to allow thinner targets that reduce material costs.

 

DC sputtering is used for conductive targets, while RF sputtering is necessary for insulating targets (like many oxides) because it prevents charge buildup on the target’s surface.

 

In reactive sputtering, a reactive gas (e.g., oxygen or nitrogen) is introduced to form compound films on the substrate, but it may also “poison” the target surface if not carefully controlled.

 

Many manufacturers prefer to control raw material quality by sourcing their own powders; using external powders can risk impurities and inconsistent target properties.

 

Targets should be stored in clean, dry conditions (often in original packaging or re-wrapped in protective materials) and handled with gloves to avoid contamination, ensuring optimal performance during deposition.

Deposition rate depends on factors such as target material and composition, power density, working gas pressure, substrate distance, and the configuration of the sputtering system (e.g., magnetron design).

 
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