Product Overview
Germanium Antimony Tellurium Doped Carbon C-GST Target is a composition-specific sputtering target for thin-film deposition and PVD process development. The practical specification normally includes chemistry, purity, dimensions, density, target configuration, and any bonding or backing requirement needed by the sputtering cathode.
Material and Deposition Characteristics
Power mode and process conditions should be selected according to the target conductivity, thermal behavior, and the requirements of the cathode system. For less common materials, conservative initial power density and film-composition verification are good practice.
Technical Data
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Material | Carbon-Doped Ge–Sb–Te (C-GST) | Enhanced phase-change performance |
| GST Composition | Ge–Sb–Te (custom ratios) | Tunes switching & resistivity |
| Carbon Content | Customized (typically low at.% levels) | Improves thermal stability |
| Purity | 99.9% – 99.99% (total) | Impacts device reliability |
| Form | Disc / Plate (bonded or unbonded) | Magnetron compatibility |
| Diameter | 25 – 300 mm (custom) | Fits standard sputtering tools |
| Thickness | 3 – 6 mm (typical) | Influences target lifetime |
| Backing Plate | Copper (optional) | Improves heat dissipation |
| Material | Key Advantage | Typical Application |
|---|---|---|
| C-GST Target | Improved endurance & data retention | Advanced PCM & neuromorphic devices |
| Standard GST | Fast switching | Conventional PCM |
| N-Doped GST | Reduced resistance drift | Memory optimization research |
| Question | Answer |
|---|---|
| What is the benefit of carbon doping in GST? | Carbon improves thermal stability, endurance, and resistance drift behavior. |
| Can GST and carbon content be customized? | Yes, both GST stoichiometry and carbon level can be tailored. |
| Are bonded targets recommended? | Yes, copper-backed targets are preferred for high-power sputtering. |
| Is DC sputtering suitable for C-GST? | Yes, DC magnetron sputtering is commonly used for C-GST films. |
| Is a Certificate of Analysis available? | Yes, CoA can be provided upon request. |
Typical Thin-Film Applications
- Thin-film research and materials-development projects requiring a composition-specific sputtering source
- Semiconductor, optical, energy, electronic, or laboratory coatings depending on the material system
- Custom R&D work where target composition, purity, and geometry need to be specified together
Target Configuration and Ordering Considerations
For quotation and manufacturability review, provide target size, thickness, purity or alloy composition, quantity, and the sputtering gun or cathode model if known. If a bonded assembly is required, include backing-plate material, bonding preference, and any dimensional tolerances, surface-finish needs, or inspection-document requirements. TFM can also review customer drawings or old-target samples for replacement builds.
Frequently Asked Questions
What is the main reason to use a Germanium Antimony Tellurium Doped Carbon C-GST Target sputtering target?
It provides a composition-specific source for thin-film deposition when the target material itself is important to the desired film chemistry or process.
How should the sputtering mode for Germanium Antimony Tellurium Doped Carbon C-GST Target be selected?
The power mode should be chosen according to target conductivity, thermal behavior, and equipment capability. Less-conductive materials are commonly evaluated with RF power.
Why are density and microstructure important for Germanium Antimony Tellurium Doped Carbon C-GST Target targets?
These factors can influence erosion stability, thermal behavior, particle generation, and the risk of cracking or local hot spots.
Can Germanium Antimony Tellurium Doped Carbon C-GST Target be supplied with a backing plate?
Yes. If the material is brittle or the cathode requires it, a bonded configuration can be reviewed according to target size, thickness, cooling, and power.
Does target composition always equal film composition?
No. Film chemistry may differ because of sputtering yields, process conditions, substrate temperature, re-sputtering, and chamber history. Film verification is recommended when composition matters.
What should I provide to request a quotation for Germanium Antimony Tellurium Doped Carbon C-GST Target?
Please provide the composition, purity, dimensions, quantity, target configuration, cathode details, and any drawing or inspection requirements.




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