Reliable and economical general-purpose components designed for high vacuum (HV) and ultra-high vacuum (UHV) applications, ensuring cleanliness and corrosion resistance.
When in the open position, the edge-welded bellows and valve seat move out of the gas path, achieving high conductance. Key features include:
- Fluorocarbon O-ring seat seals for enhanced leak protection.
- Bellows-sealed shafts and bonnet seals, with an option for copper seals to withstand higher temperature bakeouts and improve ultimate vacuum performance.
- Easy maintenance, allowing for normal repairs without the need to remove the valve body from the system.
Specifications Table
Manufacturer | TFM |
---|---|
Pressure | Torr 7.520 x 10-9 Torr mbar 1.000 x 10-8 mbar |
Rates | Leak Rate 2.000 x 10-9 mbar*L/s 1.500 x 10-9 Torr*L/s |
Temperature | Actuator 80.0 ºC 176 ºFClosed Bake 100 ºC 212 ºFOpen Bake 100 ºC 212 ºF |
Bonnet Seal Type | Fluorocarbon (FKM) |
Valve Body Material | 304L SS |
Poppet Material | Fluorocarbon (FKM) |
Shaft Seal | Welded Bellows |
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