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Planar Titanium (Ti) Sputtering Target

ST0408 Planar Zirconium (Zr) Sputtering Target

Chemical Formula: Zr
Catalog Number: ST0408
CAS Number: 7440-67-7
Purity: 99.2%-99.95%
Thermal Conductivity: 22.7 W/m.K
Melting Point (°C): 1,852
Coefficient of Thermal Expansion: 5.7 x 10-6/K

Planar Zirconium sputtering target  come in various forms, purities, sizes, and prices. Thin Film Materials (TFM) manufactures and supplies top-quality sputtering targets at competitive prices.

MSDS File

Planar Zirconium (Zr) Sputtering Target Description

The Rotatory Zirconium Sputtering Target is a series of processed products made from high-purity zirconium material, designed to have specific sizes and shapes. These targets are primarily used for vacuum coating applications.

ZirconiumZirconium is a chemical element with the symbol “Zr” and an atomic number of 40. The name “zirconium” originates from the Persian word ‘zargun,’ meaning gold-colored. It was first mentioned in 1789 and observed by Martin Heinrich Klaproth. The isolation of zirconium was later accomplished and announced by Jöns Jakob Berzelius. Zirconium is located in Period 5 and Group 4 of the periodic table, belonging to the d-block elements. Its relative atomic mass is approximately 91.224 Daltons, with the number in parentheses indicating a margin of uncertainty.

Related Product: Zirconium Sputtering Target

Planar Zirconium (Zr) Sputtering Target Specification

W L T GW
Dimension 70” 90” 1/2” < 450 lbs
Material Type Zirconium
Symbol Zr
Melting Point 1,852 °C
Color/Appearance Silvery White, Metallic
Theoretical Density 6.49 g/cc

Packaging

Our Planar Zirconium Sputtering Materials are carefully handled to prevent damage during storage and transportation, ensuring the quality of our products is preserved in their original condition.

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TFM offers Planar Zirconium  Sputtering Targets in various forms, purities, sizes, and prices. We specialize in high-purity thin film deposition materials with optimal density and minimal grain sizes, which are ideal for semiconductor, CVD, and PVD applications in display and optics. Contact Us for current pricing on sputtering targets and other deposition materials that are not listed.

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FAQ

It’s the source material (in solid form) used in sputter deposition to eject atoms or molecules that then form a thin film on a substrate.

Targets can be pure metals (e.g., gold, copper, aluminum), ceramics (e.g., Al₂O₃, SiO₂, TiO₂), alloys, or composites—chosen based on the film’s desired properties.

 

They are produced by processes such as melting/casting for metals or sintering (often with hot isostatic pressing) for ceramics and composite targets to ensure high density and purity.

 

In a vacuum chamber, a plasma (typically argon) bombards the target, ejecting atoms that travel and condense on a substrate, forming a thin film.

 

Key factors include the target’s purity, density, grain structure, and the sputtering yield (i.e. how many atoms are ejected per incident ion), as well as operating conditions like power density and gas pressure.

 

Operators monitor target erosion (often by measuring the depth of the eroded “race track”) or track total energy delivered (kilowatt-hours) until it reaches a threshold that can compromise film quality.

 

Fragile materials (such as many ceramics or certain oxides) and precious metals often require a backing plate to improve cooling, mechanical stability, and to allow thinner targets that reduce material costs.

 

DC sputtering is used for conductive targets, while RF sputtering is necessary for insulating targets (like many oxides) because it prevents charge buildup on the target’s surface.

 

In reactive sputtering, a reactive gas (e.g., oxygen or nitrogen) is introduced to form compound films on the substrate, but it may also “poison” the target surface if not carefully controlled.

 

Many manufacturers prefer to control raw material quality by sourcing their own powders; using external powders can risk impurities and inconsistent target properties.

 

Targets should be stored in clean, dry conditions (often in original packaging or re-wrapped in protective materials) and handled with gloves to avoid contamination, ensuring optimal performance during deposition.

Deposition rate depends on factors such as target material and composition, power density, working gas pressure, substrate distance, and the configuration of the sputtering system (e.g., magnetron design).

 
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