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V70S Series Rectangular Gate Valves (Low Profile)

Applications

  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems
Features
  • Removable Valve Housing Cover: Designed for easy access and maintenance.
  • Semi-Standard Applications: Compatible with various semi-standard specifications, including Semi E21-94, Semi E24-92, and Semi E21.1-1296.
  • Advanced Actuation Technology: Incorporates a patented L-motion link system and dual shifts without springs in the actuator, allowing for faster and smoother actuation while significantly minimizing vibration.
  • Effective Dust Seal: The vacuum side of the bonnet flange features a dust seal that effectively prevents particulate matter from entering the bellows.
  • Mechanical Locking Mechanism: At the end of gate travel, the valve securely locks into position, ensuring reliability.
  • Welded Bellows Actuator Seal: Provides enhanced durability and prevents leaks.
  • Retained Bonnet Flange Bolts: The bolts are designed with retainers to prevent them from falling out during disassembly, ensuring convenience.

Options

  • Custom Sizes: Tailored sizes are available to meet specific needs.
  • Variety of O-Ring Compounds: Options include different compounds such as Kalrez®, Chemraz®, and more to accommodate various applications.

Specifications Table

Temperature (°C)Valve body: 150°C
Valve actuator: 80°C
Pressure Range (torr)1 X 10-9 mbar – ATM
Differential Press (torr)≤ 1.2 bar in either direction
MaterialValve body, bonnet seal, gate: AL6061
Welded bellows: AM350
Valve actuator: SS 304, AL6061
Seal MaterialFluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec)<1 X 10-9 mbar. l/s
Cycles Until Service (approx.)≥ 2 million
Position IndicatorHoneywell: 11SM-244-T, JS-5
OperationDouble acting

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 

  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 

  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 

  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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