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V70T Series Rectangular Gate Valves (Twin)

Applications

  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems

Features

  • Semi-standard applications: This product complies with several SEMI standards, including Semi E21-94, Semi E24-92, and Semi E21.1-1296, ensuring high performance in semiconductor manufacturing environments.
  • Patented L-motion technology: The unique L-motion link and dual-shift design, which operates without springs in the actuator, delivers quicker and smoother movements while significantly reducing vibrations.
  • Enhanced dust protection: The vacuum side of the bonnet flange is equipped with a dust seal, which effectively prevents particulate contamination from entering the bellows.
  • Mechanical locking system: The valve is equipped with a mechanical lock, securing the gate in place at the end of travel, ensuring stability and preventing unintentional movement.
  • Welded bellows actuator seal: The actuator comes with a welded bellows seal, which improves durability and provides a tight, reliable seal over time.
  • Bolt retention design: The bonnet flange bolts feature retainers to prevent them from falling out during disassembly, enhancing safety and ease of maintenance.
  • Dual rectangular housing: The valve features a double rectangular housing that allows the product to enter from one side and exit from the other, streamlining flow and reducing the chance of cross-contamination.

Options

  • Custom sizes: Tailor-made sizes are available to meet specific application requirements.
  • Variety of o-ring materials: Options for different o-ring compounds, such as Kalrez® and Chemraz®, are available to accommodate varying chemical resistance needs.

Specifications Table

Temperature (°C)Valve body: 150°C
Valve actuator: 80°C
Pressure Range (torr)1 X 10-9 mbar-ATM
Differential Press (torr)≤ 1.2 bar in either direction
MaterialValve body, bonnet seal, gate: AL6061
Welded bellows: AM350
Valve actuator: SS 304, AL6061
Seal MaterialFluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec)<1 X 10-9 mbar. l/s
Cycles Until Service (approx.)≥ 2 million
Position IndicatorHoneywell: 11SM-244-T, JS-5
OperationDouble acting

Dimensional Drawings

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 

  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 

  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 

  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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