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V74 Series: Rectangular Transfer Valve (Slit Valves) – Standard

Applications

  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems
Features
  • Standards Compliance: Designed to meet semi-standard applications, including SEMI E21-94, SEMI E24-92, and SEMI E21.1-1296.
  • Innovative Actuation Technology: Incorporates a patented L-motion link and dual shifts that operate without springs in the actuator, allowing for quicker and smoother movements while minimizing vibration.
  • Enhanced Dust Protection: Features a dust seal located on the vacuum side of the bonnet flange, effectively preventing particles from entering the bellows.
  • Secure Positioning: The mechanical locking mechanism ensures that the valve remains securely in place at the end of its travel.
  • Reliable Sealing: Equipped with a welded bellows actuator seal for added durability.
  • Efficient Actuation: Utilizes a single pneumatic actuator for streamlined operation.
  • User-Friendly Design: Bonnet flange bolts are designed with retainers to prevent loss during disassembly.

Options

  • Custom Sizing: Available in various custom sizes to fit specific requirements.
  • Diverse O-ring Compounds: Choose from a range of O-ring materials, including Kalrez® and Chemraz®, to suit different applications.

Specifications Table

Temperature (°C)Valve body: 150°C
Valve actuator: 80°C
Pressure Range (torr)1 X 10-9 mbar – ATM
Differential Press (torr)≤ 1.2 bar in either direction
MaterialValve body, bonnet seal, gate: AL6061
Welded bellows: AM350
Valve actuator: SS 304, AL6061
Seal MaterialFluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec)<1 X 10-9 mbar. l/s
Cycles Until Service (approx.)≥ 2 million
Position IndicatorFESTO: SME-8M-DS-24V-K-2.5-OE
OperationDouble acting

Dimensional Drawings

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FAQ

Tube fittings are designed for tubes (measured by outside diameter and wall thickness) used in high-pressure and instrumentation applications, whereas pipe fittings are for pipes (identified by nominal pipe size) primarily used in fluid transport.

 

Common valve types include ball valves, gate valves, check valves, butterfly valves, and globe valves. Each serves a specific function—from quick shutoff (ball/gate valves) to flow regulation (globe valves).

 

  • For tubing, measure the outside diameter; for pipes, refer to the nominal pipe size (using conversion charts if needed). Always match the valve or fitting size to your pipe’s dimensions and flow requirements.

  • Frequently used thread types include NPT (National Pipe Tapered), BSP (British Standard Pipe), and UNC, along with slip-fit options that rely on compression or fusion rather than threads.

Interchangeability depends on manufacturer specifications and certification. Always verify compatibility via manufacturer guides or certified interchangeability charts.

 

  • A coupling is a short, straight fitting used to join two pipes or tubes. It provides a secure, leak-tight connection and can sometimes serve to extend or repair piping runs.

Consider valve type, pressure and temperature ratings, material compatibility with your fluid, actuation method (manual or automatic), and maintenance requirements.

 

  • Valves regulate flow by opening, closing, or partially obstructing the pathway. Their mechanisms (such as the rotation of a ball or the linear movement of a gate) determine the speed and precision of flow control.

  • A flange is a flat, circular component used to connect pipes, valves, or other equipment. Bolted together with gaskets, flanges provide a secure, leak-proof joint that facilitates both assembly and maintenance.

  • Manual valves require physical operation via handles or levers, whereas actuated valves use mechanisms—pneumatic, electric, or hydraulic—to open and close automatically or remotely.

  • Issues include leaks caused by improper installation, over-tightening, degraded seals, material incompatibility, and fatigue from repeated cycling. Regular inspection and proper installation practices help mitigate these problems.

Regular maintenance involves periodic inspections, cleaning or replacing worn seals, ensuring proper torque during installation, and adhering to manufacturer guidelines and local plumbing codes to preserve system integrity.

 

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