Rectangular Gate Valves
V74 Series Rectangular Gate Valves (Standard)
V70S Series Rectangular Gate Valves (Low Profile)
The V70S series is a rectangular gate valve that boasts a cutting-edge dual air cylinder design, allowing for a more compact footprint compared to the standard V74 series. Incorporating the same L-Motion mechanism found in the V74, this valve also features a removable top cover, making gate seal maintenance straightforward and efficient.
V72H Series Rectangular Gate Valves (Heated)
The V72H model incorporates integrated heaters for the valve body and/or gate plate within the V74 framework. This design is particularly suited for CVD applications and other processes where eliminating cold zones and preventing condensation is essential. Additionally, it retains the maintenance-friendly advantage of the V70S, featuring a removable bonnet plate for easy access and servicing.
V70T Series Rectangular Gate Valves (Twin)
V77 Series Rectangular Gate Valves (Door)
The V77 door valve is designed for isolating load lock chambers on the atmospheric side of standard semiconductor systems. It is offered in both single and twin door configurations, providing flexibility to meet various operational requirements.
V75 Series Rectangular Gate Valves (Large)
The V75 RGV is engineered for the most demanding semiconductor processes. The standard model features an opening size of 1565 mm x 95 mm, but larger and custom dimensions can be accommodated upon request, subject to review by TFM engineering.