Introduction
Hydraulically formed bellows with ConFlat (CF) flanges are essential components in ultra-high vacuum (UHV) systems, where flexibility, vacuum integrity, and cleanliness are critical. These bellows are designed to absorb mechanical movement, thermal expansion, and vibration while maintaining leak-tight performance under extreme vacuum conditions. Their use is widespread in semiconductor processing, surface science, and advanced research facilities.
Detailed Description
Hydraulically (hydro) formed bellows are manufactured from seamless stainless steel tubing using high-pressure forming techniques. This process creates uniform, thin-walled convolutions with excellent mechanical consistency and minimal weld seams, significantly reducing the risk of leaks compared to mechanically formed alternatives.
The standard unbraided wall design provides maximum flexibility and allows for greater axial, lateral, and angular movement. This makes them ideal for applications requiring precise alignment compensation or vibration isolation. However, unlike braided bellows, unbraided versions are not intended for high-pressure load-bearing applications but instead focus on flexibility and vacuum performance.
Equipped with ConFlat (CF) flanges, these bellows ensure reliable metal-to-metal sealing using copper gaskets. CF flanges are widely recognized for their ability to achieve and maintain UHV conditions (down to 10⁻¹⁰ Torr or lower), making them the preferred choice in high-vacuum environments.
The hydroforming process also improves surface finish and cleanliness, which is critical for minimizing outgassing in UHV systems. Materials such as 304L or 316L stainless steel are commonly used to ensure corrosion resistance, low permeability, and compatibility with bake-out procedures.
Applications
Hydraulically formed CF bellows are widely used in:
- Ultra-high vacuum (UHV) chambers and systems
- Semiconductor fabrication equipment (PVD, CVD, etching systems)
- Particle accelerators and synchrotron beamlines
- Vacuum transfer lines and load lock systems
- Research laboratories and surface analysis instruments
- Aerospace and space simulation vacuum systems
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Material | 304L / 316L Stainless Steel | Ensures corrosion resistance and low outgassing |
| Flange Type | CF (ConFlat) | Provides reliable UHV metal sealing |
| Nominal Size | DN16 – DN200 (custom available) | Matches standard vacuum system dimensions |
| Wall Type | Standard unbraided | Maximizes flexibility and motion absorption |
| Leak Rate | ≤ 1 × 10⁻¹⁰ mbar·L/s | Critical for maintaining UHV conditions |
| Operating Pressure | UHV to atmosphere | Suitable for high vacuum applications |
| Bake-out Temp | Up to 450°C (material dependent) | Enables system degassing and cleanliness |
Comparison with Related Bellows Types
| Type | Key Advantage | Typical Application |
|---|---|---|
| Hydroformed Unbraided Bellows | High flexibility, clean structure | UHV systems, precision alignment |
| Mechanically Formed Bellows | Lower cost, simpler manufacturing | General vacuum systems |
| Braided Bellows | Higher pressure resistance | Rough vacuum, mechanical protection |
FAQ
| Question | Answer |
|---|---|
| What is the advantage of hydroformed bellows? | Hydroforming produces uniform, seamless convolutions with improved flexibility and reduced leak risk. |
| Why choose unbraided bellows? | Unbraided designs offer maximum flexibility and are ideal for applications requiring movement compensation. |
| Are these bellows suitable for UHV applications? | Yes, when paired with CF flanges, they are designed for ultra-high vacuum environments. |
| Can sizes and lengths be customized? | Yes, custom dimensions, flange sizes, and configurations are available upon request. |
| Do they support high-pressure applications? | Unbraided bellows are not recommended for high-pressure load-bearing; braided versions are preferred for that purpose. |
Packaging
Our Hydraulically Formed Bellows – ConFlat (CF) UHV Flanged (Standard Unbraided Wall) are meticulously tagged and labeled externally to ensure efficient identification and maintain high standards of quality control. We take great care to prevent any potential damage during storage and transportation, ensuring the bellows arrive in perfect condition.
Conclusion
Hydraulically formed CF UHV bellows provide a reliable solution for maintaining vacuum integrity while accommodating mechanical movement in demanding environments. Their superior flexibility, clean manufacturing process, and compatibility with ultra-high vacuum systems make them indispensable in advanced industrial and research applications.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
Ordering Table
| Drawing | FlangeSize | Length | Note | Part Number | VacuCADSM |
| 1-1/3" | 3 | — | MH-CF-A03 | N/A |
|
| 1-1/3" | 6 | — | MH-CF-A06 | N/A |
|
| 1-1/3" | 10 | — | MH-CF-A10 | N/A |
|
| 1-1/3" | 12 | — | MH-CF-A12 | N/A |
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| 1-1/3" | 18 | — | MH-CF-A18 | N/A |
|
| 1-1/3" | 20 | — | MH-CF-A20 | N/A |
|
| 1-1/3" | 24 | — | MH-CF-A24 | N/A |
|
| 1-1/3" | 30 | — | MH-CF-A30 | N/A |
|
| 1-1/3" | 36 | — | MH-CF-A36 | N/A |
|
| 1-1/3" | 40 | — | MH-CF-A40 | N/A |
|
| 1-1/3" | 48 | — | MH-CF-A48 | N/A |
|
| 2-1/8" | 6 | — | MH-CF-B06 | N/A |
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| 2-3/4" | 3 | — | MH-CF-C03 | N/A |
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| 2-3/4" | 6 | — | MH-CF-C06 | N/A |
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| 2-3/4" | 10 | — | MH-CF-C10 | N/A |
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| 2-3/4" | 12 | — | MH-CF-C12 | N/A |
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| 2-3/4" | 18 | — | MH-CF-C18 | N/A |
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| 2-3/4" | 20 | — | MH-CF-C20 | N/A |
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| 2-3/4" | 24 | — | MH-CF-C24 | N/A |
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| 2-3/4" | 30 | — | MH-CF-C30 | N/A |
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| 2-3/4" | 36 | — | MH-CF-C36 | N/A |
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| 2-3/4" | 40 | — | MH-CF-C40 | N/A |
|
| 2-3/4" | 48 | — | MH-CF-C48 | N/A |
|
| 3-3/8" | 6 | — | MH-CF-D06 | N/A |
|
| 4-1/2" | 6 | — | MH-CF-E06 | N/A |
|
| 6" | 6 | — | MH-CF-G06 | N/A |
|
| 6-3/4" | 6 | MH-CF-H06 | N/A | |
|
| 8" | 6 | — | MH-CF-J06 | N/A |
Accessories Table
Hydraulically (Hydro) Formed Bellows - ConFlat (CF) UHV Flanged (Standard Unbraided Wall) 2
| Description | For | Per Package | Manual | VacuCADSM | Part Number |
| Gasket, Copper, DN100CF (6.00" OD) Flange, 4.743" OD,4.006" ID, (10) Per Package | 6" (DN100CF) Flanges | 10 | — | N/A | GA-0600 |
| Gasket, Copper, DN16CF (1.33" OD) Flange , 0.837" OD, 0.640" ID, (10) Per Package | 1-1/3" (DN16CF) Flanges | 10 | — | N/A | GA-0133 |
| Gasket, Copper, DN35CF-DN40CF (2.75" OD) Flange, 1.895" OD, 1.451" ID, (10) Per Package | 2-3/4" (DN35-DN40CF) Flanges | 10 | — | N/A | GA-0275 |
| Gasket, Copper, DN50CF (3.375" OD) Flange, 2.425" OD, 2.010" ID, (10) Per Package | 3-3/8" (DN50CF) Flanges | 10 | — | N/A | GA-0337 |
| Gasket, Copper, DN63CF (4.50" OD) Flange, 3.243" OD, 2.506" ID, (10) Per Package | 4-1/2" (DN63CF) Flanges | 10 | — | N/A | GA-0450 |
| Gasket, Copper, DN160CF (8.00" OD) Flange, 6.743" OD, 6.007" ID, (10) Per Package | 8" (DN160CF) Flanges | 10 | — | N/A | GA-0800 |
| Thread Lubricant, 4 Ounce Tube | All CF Flanges | 1 | — | N/A | VZTL-4OZ |
| Gasket Removal Tool, For All Conflat (CF) Flange Sizes | All CF Flanges | 1 | — | N/A | VZGRT |
| Gasket, Copper, DN25 (2.125" OD) Flange, 1.291" OD, 1.010" ID, (10) Per Package | 2-1/8" (DN25CF) Flanges | 10 | — | N/A | GA-0212 |
| Gasket, Copper, DN125CF (6.75" OD) Flange, 5.567" OD x 5.010" ID, (10) Per Package | 6-3/4" (DN125CF) Flanges | 10 | — | N/A | GA-0675 |
| Gasket Clips, For All Conflat (CF) Flange Sizes, (10) Per Package | All CF Flanges | 10 | N/A | VGC0275S |
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