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ST0177 Molybdenum Oxide Sputtering Target, MoO3

Chemical Formula: MoO3
Catalog Number: ST0177
CAS Number: 1313-27-5
Purity: >99.9%, 99.95%
Shape: Discs, Plates, Column Targets, Step Targets, Custom-made

 Molybdenum Oxide (MoO)  sputtering target  come in various forms, purities, sizes, and prices. Thin Film Materials (TFM) manufactures and supplies top-quality sputtering targets at competitive prices.

MSDS File

Molybdenum Oxide Sputtering Target Description

The Molybdenum Oxide Sputtering Target from TFM is an oxide sputtering material composed of molybdenum (Mo) and oxygen (O). This material is used in various applications due to its unique properties and performance characteristics.

Molybdenum

Molybdenum is a chemical element that originated from the Greek ‘molybdos’ meaning lead. It was first mentioned in 1778 and observed by W. Scheele. The isolation was later accomplished and announced by J. Hjelm. “Mo” is the canonical chemical symbol of molybdenum. Its atomic number in the periodic table of elements is 42 with a location at Period 5 and Group 6, belonging to the d-block. The relative atomic mass of molybdenum is 95.94(2) Dalton, the number in the brackets indicating the uncertainty.

Related Product: Molybdenum Sputtering TargetOxygen

Oxygen is a chemical element with the symbol “O,” originating from the Greek words ‘oxy’ and ‘genes,’ meaning acid-forming. It was first mentioned and observed by W. Scheele in 1771, who also achieved and announced its isolation. Oxygen has an atomic number of 8 and is located in Period 2, Group 16 of the periodic table, within the p-block. Its relative atomic mass is 15.9994(3) Dalton, with the number in brackets indicating the measurement uncertainty. Oxygen is essential for life, playing a crucial role in respiration, combustion, and various chemical processes. It is also a major component of water, organic compounds, and the Earth’s atmosphere.

Molybdenum Oxide Sputtering Target Specification

Material TypeMolybdenum Oxide
SymbolMoO3
Color/AppearanceSolid
Melting Point795° C
Density4.69 g/cm³
Type of BondIndium, Elastomer
Available SizesDia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

Molybdenum Oxide Sputtering Target Handling Notes

  • Indium Bonding and Elastomeric Bonding: For the Molybdenum Oxide (MoO) sputtering target, both indium bonding and elastomeric bonding are recommended. TFM collaborates with the Taiwan Bonding Company to offer high-quality bonding services, ensuring optimal performance and durability of the targets. The company also machines standard backing plates to precisely fit the sputtering targets.
  • Thermal Conductivity: Molybdenum oxide has low thermal conductivity, which makes it susceptible to thermal shock. Proper bonding and handling techniques are essential to prevent damage and ensure the stability of the target during the sputtering process.

Packaging

Our Molybdenum Oxide (MoO) Sputtering Target is meticulously tagged and labeled externally to ensure efficient identification and maintain stringent quality control. We take extensive precautions to prevent any damage during storage and transportation, ensuring that the targets arrive in excellent condition and retain their high quality for optimal performance in various applications.

Get Contact

TFM offers Molybdenum Oxide (MoO) Sputtering Targets in various forms, purities, sizes, and prices. We specialize in high-purity thin film deposition materials with optimal density and minimal grain sizes, which are ideal for semiconductor, CVD, and PVD applications in display and optics. Contact Us for current pricing on sputtering targets and other deposition materials that are not listed.

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FAQ

It’s the source material (in solid form) used in sputter deposition to eject atoms or molecules that then form a thin film on a substrate.

Targets can be pure metals (e.g., gold, copper, aluminum), ceramics (e.g., Al₂O₃, SiO₂, TiO₂), alloys, or composites—chosen based on the film’s desired properties.

 

They are produced by processes such as melting/casting for metals or sintering (often with hot isostatic pressing) for ceramics and composite targets to ensure high density and purity.

 

In a vacuum chamber, a plasma (typically argon) bombards the target, ejecting atoms that travel and condense on a substrate, forming a thin film.

 

Key factors include the target’s purity, density, grain structure, and the sputtering yield (i.e. how many atoms are ejected per incident ion), as well as operating conditions like power density and gas pressure.

 

Operators monitor target erosion (often by measuring the depth of the eroded “race track”) or track total energy delivered (kilowatt-hours) until it reaches a threshold that can compromise film quality.

 

Fragile materials (such as many ceramics or certain oxides) and precious metals often require a backing plate to improve cooling, mechanical stability, and to allow thinner targets that reduce material costs.

 

DC sputtering is used for conductive targets, while RF sputtering is necessary for insulating targets (like many oxides) because it prevents charge buildup on the target’s surface.

 

In reactive sputtering, a reactive gas (e.g., oxygen or nitrogen) is introduced to form compound films on the substrate, but it may also “poison” the target surface if not carefully controlled.

 

Many manufacturers prefer to control raw material quality by sourcing their own powders; using external powders can risk impurities and inconsistent target properties.

 

Targets should be stored in clean, dry conditions (often in original packaging or re-wrapped in protective materials) and handled with gloves to avoid contamination, ensuring optimal performance during deposition.

Deposition rate depends on factors such as target material and composition, power density, working gas pressure, substrate distance, and the configuration of the sputtering system (e.g., magnetron design).

 
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