Introduction
(La₀.₂Ce₀.₂Gd₀.₂Y₀.₂Er₀.₂)Zr₂O₇ Sputtering Target is a multi-component rare-earth zirconate ceramic target developed for advanced functional coatings and research-driven thin film applications. By incorporating five rare-earth elements in an equimolar ratio, this complex oxide offers enhanced structural stability, tunable thermal properties, and compositional flexibility, making it especially attractive for next-generation thermal barrier coatings (TBCs), functional oxide films, and materials science research.
Detailed Description
This sputtering target is based on a high-entropy rare-earth zirconate composition, where La, Ce, Gd, Y, and Er jointly occupy the A-site of the zirconate lattice. Such compositional complexity can significantly improve phase stability, phonon scattering, and resistance to thermal degradation compared with conventional single- or binary-rare-earth zirconates.
The target is fabricated using carefully controlled powder synthesis, homogeneous mixing, and high-temperature sintering to achieve uniform elemental distribution and high density. Strict control of stoichiometry is essential, as even minor compositional deviations can influence lattice distortion, thermal conductivity, and film performance.
Targets can be supplied as unbonded ceramic discs for low-to-moderate power sputtering, or bonded to metallic backing plates (such as copper or titanium) to improve heat dissipation and mechanical stability during higher-power RF magnetron sputtering. The material is well suited for oxide deposition processes requiring precise composition transfer from target to film.
Applications
Thermal barrier coatings (TBCs) and advanced thermal management films
High-entropy oxide thin film research
Functional ceramic and dielectric coatings
Energy, aerospace, and high-temperature materials research
Academic and industrial thin film R&D
Technical Parameters
| Parameter | Typical Value / Range | Importance |
|---|---|---|
| Chemical Formula | (La₀.₂Ce₀.₂Gd₀.₂Y₀.₂Er₀.₂)Zr₂O₇ | Multi-component rare-earth zirconate |
| Purity | 99.9% – 99.99% (total) | Affects phase stability & film quality |
| Target Form | Disc / Plate (bonded or unbonded) | Compatible with sputtering systems |
| Diameter | 25 – 300 mm (custom) | Fits standard magnetron cathodes |
| Thickness | 3 – 6 mm (typical) | Influences target lifetime |
| Sputtering Mode | RF magnetron sputtering | Suitable for insulating ceramics |
| Backing Plate | Copper / Titanium (optional) | Improves thermal management |
Comparison with Related Materials
| Material | Key Advantage | Typical Application |
|---|---|---|
| (La₀.₂Ce₀.₂Gd₀.₂Y₀.₂Er₀.₂)Zr₂O₇ | High-entropy stability, low thermal conductivity | Advanced TBC & research films |
| Yttria-Stabilized Zirconia (YSZ) | Mature, well-studied | Conventional TBCs |
| Gd₂Zr₂O₇ | Low thermal conductivity | Next-gen TBC research |
FAQ
| Question | Answer |
|---|---|
| Is this target suitable for RF sputtering? | Yes, RF magnetron sputtering is recommended for this insulating ceramic. |
| Can the composition ratio be adjusted? | Yes, rare-earth ratios can be customized for specific research needs. |
| Are bonded targets available? | Yes, copper- or titanium-backed targets are available on request. |
| How is compositional uniformity ensured? | Through controlled powder processing, mixing, and sintering. |
| Is a Certificate of Analysis provided? | Yes, CoA is available upon request. |
Packaging
Our (La₀.₂Ce₀.₂Gd₀.₂Y₀.₂Er₀.₂)Zr₂O₇ Sputtering Targets are carefully labeled and vacuum-sealed or inert-gas packed to protect against contamination and moisture. Shock-absorbing materials and export-grade cartons or crates ensure safe transportation and storage.
Conclusion
(La₀.₂Ce₀.₂Gd₀.₂Y₀.₂Er₀.₂)Zr₂O₇ Sputtering Target offers exceptional compositional stability, advanced thermal behavior, and high research value for complex oxide thin film deposition. With flexible customization, reliable quality control, and suitability for high-end RF sputtering applications, it is an ideal choice for cutting-edge ceramic and thermal barrier coating research.
For detailed specifications and a quotation, please contact us at sales@thinfilmmaterials.com.
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